Weight compensation mechanism and robot arm using the same
    1.
    发明授权
    Weight compensation mechanism and robot arm using the same 有权
    重量补偿机构和机器人臂使用相同

    公开(公告)号:US08794099B2

    公开(公告)日:2014-08-05

    申请号:US13314566

    申请日:2011-12-08

    摘要: The present invention discloses a weight compensation mechanism installed at a rotatable three-degree-of-freedom link member, wherein a first rotation of the link member is a yaw rotation aligned with the direction of the gravity and second and third rotations of the link member are respectively a roll rotation and a pitch rotation, wherein the second and third rotations are restrained by a plurality of differential bevel gears, and wherein a pair of cam plates is fixed to shafts of a pair of rotary bevel gears in the plurality of differential bevel gears, and a one-degree-of-freedom weight compensator is provided to be connected to the cam plates.

    摘要翻译: 本发明公开了一种安装在可旋转的三自由度连杆构件上的重量补偿机构,其中连杆构件的第一旋转是与重力方向对齐的偏转旋转,连杆构件的第二和第三旋转 分别是辊旋转和俯仰旋转,其中第二和第三旋转被多个差速锥齿轮约束,并且其中一对凸轮板固定到多个差速斜面中的一对旋转锥齿轮的轴 齿轮和一个自由度重量补偿器连接到凸轮板上。

    Method of fabricating semiconductor device
    2.
    发明授权
    Method of fabricating semiconductor device 有权
    制造半导体器件的方法

    公开(公告)号:US08765572B2

    公开(公告)日:2014-07-01

    申请号:US13168312

    申请日:2011-06-24

    IPC分类号: H01L21/764

    摘要: A method of fabricating a semiconductor device, in which an interference effect between word lines is substantially reduced or eliminated, includes forming a plurality of gate patterns on a substrate; forming a first insulating layer between the gate patterns, the first insulating layer filling a region between the gate patterns; etching the first insulating layer to remove a portion of the first insulating layer to a predetermined depth; and forming a second insulating layer on the gate patterns and the first insulating layer. A low-dielectric-constant material is formed between the gate patterns.

    摘要翻译: 一种制造半导体器件的方法,其中字线之间的干涉效应被显着地减少或消除,包括在衬底上形成多个栅极图案; 在所述栅极图案之间形成第一绝缘层,所述第一绝缘层填充所述栅极图案之间的区域; 蚀刻第一绝缘层以将第一绝缘层的一部分去除到预定深度; 以及在栅极图案和第一绝缘层上形成第二绝缘层。 在栅极图案之间形成低介电常数材料。

    METHODS OF FORMING PATTERN STRUCTURES AND METHODS OF FORMING CAPACITORS USING THE SAME
    3.
    发明申请
    METHODS OF FORMING PATTERN STRUCTURES AND METHODS OF FORMING CAPACITORS USING THE SAME 审中-公开
    形成图案结构的方法及使用其形成电容器的方法

    公开(公告)号:US20130140265A1

    公开(公告)日:2013-06-06

    申请号:US13608232

    申请日:2012-09-10

    IPC分类号: H01G9/00 B44C1/22

    摘要: A method of manufacturing a pattern structure, the method includes sequentially forming a mold layer and a mask layer on a substrate, patterning the mask layer to form a mask having a plurality of first and second holes located at vertices of hexagons that form a honeycomb structure, forming filling layer patterns in the first and second holes, removing the mask, forming a spacer on sidewalls of the filling layer patterns and the spacer has a plurality of third holes at centers of the hexagons, removing the filling layer patterns to form an etching mask including the spacer, and etching the mold layer using the etching mask to form the pattern structure having a plurality of openings located at the vertices and the centers of the hexagons.

    摘要翻译: 一种图案结构的制造方法,其特征在于,在基板上依次形成模具层和掩模层,对掩模层进行图案化,形成掩模,该掩模具有位于形成蜂窝结构体的六边形顶点的多个第一和第二孔 在第一和第二孔中形成填充层图案,去除掩模,在填充层图案的侧壁上形成间隔物,并且间隔物在六边形的中心处具有多个第三孔,去除填充层图案以形成蚀刻 掩模,并且使用蚀刻掩模蚀刻模具层以形成具有位于六边形的顶点和中心处的多个开口的图案结构。

    Substrate test probing equipment having forcing part for test head and force-receiving pattern for probe card and methods of using the same
    5.
    发明授权
    Substrate test probing equipment having forcing part for test head and force-receiving pattern for probe card and methods of using the same 有权
    具有强制部分用于探针卡的测试头和受力图案的基板测试探测设备及其使用方法

    公开(公告)号:US07701235B2

    公开(公告)日:2010-04-20

    申请号:US12098778

    申请日:2008-04-07

    IPC分类号: G01R31/02

    CPC分类号: G01R31/2889 G01R31/2891

    摘要: Substrate test probing equipment having a force-receiving pattern for a probe card and a forcing part for a test head, and methods of using the same, in which with the force-receiving pattern for the probe card and the forcing part for the test head, thermal expansion and contraction of the probe card can be suppressed when the semiconductor substrate is being tested at high and low temperatures. To this end, to substrate test probing equipment having a substrate mover, a probe card, and a test head is prepared, in which the test head has a forcing part and the probe card has a force-receiving plate. A semiconductor substrate is placed on the substrate mover to be electrically connected with the probe card. The semiconductor substrate is electrically tested by the probe card and the test head. When the semiconductor substrate is being tested, the forcing part of the test head is brought into contact with the force-receiving pattern of the probe card.

    摘要翻译: 具有用于探针卡的力接收图案和用于测试头的强制部件的基板测试探测设备及其使用方法,其中用于探针卡的受力图案和用于测试头的强制部件 当在高温和低温下测试半导体衬底时,可以抑制探针卡的热膨胀和收缩。 为此,制备具有基板移动器,探针卡和测试头的基板测试探测设备,其中测试头具有强制部分,探针卡具有受力板。 将半导体衬底放置在衬底移动器上以与探针卡电连接。 半导体衬底由探针卡和测试头电测试。 当半导体衬底被测试时,测试头的强制部分与探针卡的受力图案接触。

    Semiconductor device including storage node and method of manufacturing the same
    6.
    发明授权
    Semiconductor device including storage node and method of manufacturing the same 有权
    包括存储节点的半导体器件及其制造方法

    公开(公告)号:US07180118B2

    公开(公告)日:2007-02-20

    申请号:US10830895

    申请日:2004-04-22

    IPC分类号: H01L27/108

    摘要: A semiconductor device including storage nodes and a method of manufacturing the same: The method includes forming an insulating layer and an etch stop layer on a semiconductor substrate; forming storage node contact bodies to be electrically connected to the semiconductor substrate by penetrating the insulating layer and the etch stop layer; forming landing pads on the etch stop layer to be electrically connected to the storage node contact bodies, respectively; and forming storage nodes on the landing pads, respectively, the storage nodes of which outward sidewalls are completely exposed and which are arranged at an angle to each other.

    摘要翻译: 一种包括存储节点的半导体器件及其制造方法,该方法包括在半导体衬底上形成绝缘层和蚀刻停止层; 通过穿透所述绝缘层和所述蚀刻停止层形成要与所述半导体衬底电连接的存储节点接触体; 在所述蚀刻停止层上形成分别电连接到所述存储节点接触体的着陆焊盘; 以及分别在着陆焊盘上形成存储节点,其外侧壁完全暴露的存储节点和彼此成角度地布置。

    Semiconductor devices having storage nodes
    7.
    发明申请
    Semiconductor devices having storage nodes 有权
    具有存储节点的半导体器件

    公开(公告)号:US20050156272A1

    公开(公告)日:2005-07-21

    申请号:US11077838

    申请日:2005-03-11

    摘要: A semiconductor device is manufactured by forming a first insulating layer on a semiconductor substrate. First contact pads and second contact pads are formed that penetrate through the first insulating layer and are electrically connected to the semiconductor substrate. A second insulating layer is formed that has guide contact holes that expose upper surfaces of the first contact pads. An etch stopper is formed on bottoms and sidewalls of the guide contact holes of the second insulating layer. Bit lines are formed that are electrically connected to the semiconductor substrate by the second contact pads. The bit lines are electrically isolated from the first contact pads.

    摘要翻译: 通过在半导体衬底上形成第一绝缘层来制造半导体器件。 形成穿过第一绝缘层并与半导体衬底电连接的第一接触焊盘和第二接触焊盘。 形成具有暴露第一接触垫的上表面的引导接触孔的第二绝缘层。 在第二绝缘层的引导接触孔的底部和侧壁上形成蚀刻停止层。 形成通过第二接触焊盘电连接到半导体衬底的位线。 位线与第一接触焊盘电隔离。

    Test circuit and method for refresh and descrambling in an integrated
memory circuit
    8.
    发明授权
    Test circuit and method for refresh and descrambling in an integrated memory circuit 失效
    用于在集成存储器电路中刷新和解扰的测试电路和方法

    公开(公告)号:US5844914A

    公开(公告)日:1998-12-01

    申请号:US850807

    申请日:1997-05-02

    CPC分类号: G11C29/18 G01R31/31813

    摘要: A semiconductor memory device and method is shown in which a built-in system test (BIST) circuit determines, based upon the test algorithm and the refresh requirements of a DRAM memory cell array, a refresh point address where the BIST circuit performs a refresh operation on the test data in the memory cell array when the test address reaches the refresh point address. Another embodiment of a semiconductor memory device and method is also shown in which a BIST circuit descrambles the test address and test data before input to a memory circuit which includes address and data scrambling circuits such that the logical test address and test data generated according to a test algorithm matches the physical address and data in the memory cell array.

    摘要翻译: 示出了半导体存储器件和方法,其中内置系统测试(BIST)电路基于测试算法和DRAM存储单元阵列的刷新要求确定BIST电路执行刷新操作的刷新点地址 当测试地址到达刷新点地址时,在存储单元阵列中的测试数据。 还示出了半导体存储器件和方法的另一实施例,其中BIST电路在输入到存储器电路之前对测试地址和测试数据进行解扰,该存储器电路包括地址和数据加扰电路,使得逻辑测试地址和根据 测试算法与存储单元阵列中的物理地址和数据相匹配。

    Manipulator with weight compensation mechanism and face robot using the same
    9.
    发明授权
    Manipulator with weight compensation mechanism and face robot using the same 有权
    具有重量补偿机构的机器人和使用其的面机器人

    公开(公告)号:US08789440B2

    公开(公告)日:2014-07-29

    申请号:US13314383

    申请日:2011-12-08

    IPC分类号: B25J17/00

    CPC分类号: B25J11/0015 B25J19/0016

    摘要: This disclosure relates to a face robot which is operated similarly to the motion of a human head and a multi-joint manipulator which supports a robot's face, and more particularly, to a structure which may compensate an influence caused by the gravity and exerted on rotation parts rotating about its axes. A manipulator with a weight compensation mechanism of the disclosure is provided, the manipulator having rotation parts connected to a plurality of axes rotating about their axes, the manipulator including: a weight compensation mechanism that supports wires connected to the rotation parts receiving gravity in a rotation state by a spring and compensates an influence of gravity exerted on the rotation parts.

    摘要翻译: 本公开涉及一种面向机器人,其类似于人体头部的运动和支持机器人面部的多关节机械手的操作,更具体地,涉及可以补偿由重力引起的影响并施加在旋转上的结构 零件围绕其轴旋转。 提供了具有本发明的重量补偿机构的操纵器,所述操纵器具有连接到围绕其轴线旋转的多个轴线的旋转部分,所述操纵器包括:重量补偿机构,其支撑连接到旋转部分的线, 通过弹簧状态补偿施加在旋转部件上的重力的影响。

    Harmonic drive using profile shifted gear
    10.
    发明授权
    Harmonic drive using profile shifted gear 有权
    谐波驱动使用轮廓切换齿轮

    公开(公告)号:US08656800B2

    公开(公告)日:2014-02-25

    申请号:US12991887

    申请日:2008-07-03

    IPC分类号: F16H57/00

    CPC分类号: F16H49/001

    摘要: A harmonic drive according to the present invention comprises a plurality of internal gears; a band type of flexible gear provided with teeth engaged with each of the internal gears on its outer circumferential surface, the flexible gear having a pitch circumference length shorter than that of said internal gears; and a wave generating part disposed on an inner side of said flexible gear, the wave generating part generating a plurality of harmonic motions by deforming said flexible gear as the wave generating part rotates. Further, said flexible gear is formed integrally to engage with said plurality of internal gears so that the plurality of harmonic motions are overlapped, and one or more of said plurality of internal gears and said flexible gear are formed of profile shifted gears.

    摘要翻译: 根据本发明的谐波驱动器包括多个内齿轮; 带状的柔性齿轮具有与其外圆周表面上的每个内齿轮啮合的齿,所述柔性齿轮具有比所述内齿轮短的节圆周长; 以及波形产生部,其设置在所述柔性齿轮的内侧,所述波发生部通过使波动发生部旋转而使所述柔性齿轮变形而产生多次谐波运动。 此外,所述柔性齿轮一体地形成为与所述多个内齿轮啮合,使得多个谐波运动重叠,并且所述多个内齿轮和所述柔性齿轮中的一个或多个由轮廓移位齿轮形成。