发明授权
- 专利标题: Aerostatically guided table system for vacuum application
- 专利标题(中): 气动导向台系统用于真空应用
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申请号: US12618839申请日: 2009-11-16
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公开(公告)号: US08496221B2公开(公告)日: 2013-07-30
- 发明人: Gerhard Schubert , Christian Jackel , Ulf-Carsten Kirschstein , Michael Boehm , René Bauer , Gerd Harnisch , Thomas Peschel , Stefan Risse , Christoph Schenk
- 申请人: Gerhard Schubert , Christian Jackel , Ulf-Carsten Kirschstein , Michael Boehm , René Bauer , Gerd Harnisch , Thomas Peschel , Stefan Risse , Christoph Schenk
- 申请人地址: DE Jena
- 专利权人: Vistec Electron Beam GmbH
- 当前专利权人: Vistec Electron Beam GmbH
- 当前专利权人地址: DE Jena
- 代理机构: Patentbar International P.C.
- 优先权: DE102008058306 20081117
- 主分类号: F16C32/06
- IPC分类号: F16C32/06
摘要:
A table system for vacuum application has a base plate and a moving table guided by aerostatic bearing units. The bearing units (10) are connected to supply lines and suction lines for supplying and extracting the gas required for the operation of the bearing units and are provided in each instance with a sealing system having at least one stage and comprising suction channel and sealing gap for sealing relative to the vacuum. The table system is characterized in that the aerostatic bearing units (10) are constructed at least partially as swivel joints, and a push rod (4) which is actuated by a drive (5) for guiding the moving table laterally is connected to the rotating part (21) of each swivel joint, and in that the push rods (4) are hollow and constitute a component part of the suction lines for extracting the operating gas.
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