Invention Grant
- Patent Title: Method of fabricating multi-fingered semiconductor devices on a common substrate
- Patent Title (中): 在公共基板上制造多指半导体器件的方法
-
Application No.: US12684697Application Date: 2010-01-08
-
Publication No.: US08497179B2Publication Date: 2013-07-30
- Inventor: Akif Sultan
- Applicant: Akif Sultan
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES, Inc.
- Current Assignee: GLOBALFOUNDRIES, Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Ingrassia Fisher & Lorenz, P.C.
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A method of fabricating p-type metal oxide semiconductor (PMOS) transistor devices on a common substrate is presented. The method provides a first portion of semiconductor material and a second portion of semiconductor material on the common substrate. The first portion of semiconductor material and the second portion of semiconductor material are insulated from each other. The method continues by creating first PMOS transistor devices using the first portion of semiconductor material. The first PMOS transistor devices include stressor regions that impart compressive stress to channel regions of the first PMOS transistor devices. The method also creates second PMOS transistor devices using the second portion of semiconductor material. The second PMOS transistor devices do not include channel stressor regions.
Public/Granted literature
- US20110171801A1 METHOD OF FABRICATING MULTI-FINGERED SEMICONDUCTOR DEVICES ON A COMMON SUBSTRATE Public/Granted day:2011-07-14
Information query
IPC分类: