Invention Grant
- Patent Title: Ion source having a shutter assembly
- Patent Title (中): 具有快门组件的离子源
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Application No.: US13651685Application Date: 2012-10-15
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Publication No.: US08497486B1Publication Date: 2013-07-30
- Inventor: Jeffrey Charles Blahnik , William T. Weaver
- Applicant: Varian Semiconductor Equipment Associates, Inc.
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01J49/10
- IPC: H01J49/10 ; H01J37/317 ; H01J27/02 ; H01J3/07

Abstract:
An ion source includes arc chamber housing defining an arc chamber. The arc chamber housing has an extraction plate in a fixed position, and the extraction plate defines a plurality of extraction apertures. The ion source also includes a shutter assembly positioned outside of the arc chamber proximate the extraction plate. The shutter assembly is configured to block at least a portion of one of the plurality of extraction apertures during one time interval. The ion source combined with relative movement of a workpiece to be treated with an ion beam extracted from the ion source enables a two dimensional ion implantation pattern to be formed on the workpiece using only one ion source.
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