发明授权
US08497554B2 Semiconductor device comprising metal gate structures formed by a replacement gate approach and efuses including a silicide
有权
半导体器件包括通过替换栅极方法形成的金属栅极结构和包括硅化物的熔点
- 专利标题: Semiconductor device comprising metal gate structures formed by a replacement gate approach and efuses including a silicide
- 专利标题(中): 半导体器件包括通过替换栅极方法形成的金属栅极结构和包括硅化物的熔点
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申请号: US12942506申请日: 2010-11-09
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公开(公告)号: US08497554B2公开(公告)日: 2013-07-30
- 发明人: Andy Wei , Jens Heinrich , Ralf Richter
- 申请人: Andy Wei , Jens Heinrich , Ralf Richter
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Williams, Morgan & Amerson, P.C.
- 优先权: DE102010003559 20100331
- 主分类号: H01L23/62
- IPC分类号: H01L23/62
摘要:
In a replacement gate approach for forming high-k metal gate electrode structures, electronic fuses may be provided on the basis of a semiconductor material in combination with a metal silicide by using a recessed surface topography and/or a superior selectivity of the metal silicide material during the replacement gate process. For example, in some illustrative embodiments, electronic fuses may be provided in a recessed portion of an isolation region, thereby avoiding the removal of the semiconductor material when replacing the semiconductor material of the gate electrode structures with a metal-containing electrode material. Consequently, the concept of well-established semiconductor-based electronic fuses may be applied together with sophisticated replacement gate structures of transistors.
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