Invention Grant
US08497757B2 Method and apparatus for preventing catastrophic contact failure in ultra high temperature piezoresistive sensors and transducers 有权
用于防止超高压压阻传感器和换能器中的灾难性接触故障的方法和装置

Method and apparatus for preventing catastrophic contact failure in ultra high temperature piezoresistive sensors and transducers
Abstract:
A piezoresistive sensor device and a method for making a piezoresistive device are disclosed. The sensor device comprises a silicon wafer having piezoresistive elements and contacts in electrical communication with the elements. The sensor device further comprises a contact glass coupled to the silicon wafer and having apertures aligned with the contacts. The sensor device also comprises a non-conductive frit for mounting the contact glass to a header glass, and a conductive non-lead glass frit disposed in the apertures and in electrical communication with the contacts. The method for making a piezoresistive sensor device, comprises bonding a contact glass to a silicon wafer such that apertures in the glass line up with contacts on the wafer, and filling the apertures with a non-lead glass frit such that the frit is in electrical communication with the contacts. The use of a lead free glass frit prevents catastrophic failure of the piezoresistive sensor and associated transducer in ultra high temperature applications.
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