发明授权
US08498911B2 Particle generation factor determining system, charging method and storage medium 有权
粒子生成因子决定系统,计费方法和存储介质

  • 专利标题: Particle generation factor determining system, charging method and storage medium
  • 专利标题(中): 粒子生成因子决定系统,计费方法和存储介质
  • 申请号: US12820692
    申请日: 2010-06-22
  • 公开(公告)号: US08498911B2
    公开(公告)日: 2013-07-30
  • 发明人: Tsuyoshi Moriya
  • 申请人: Tsuyoshi Moriya
  • 申请人地址: JP Tokyo
  • 专利权人: Tokyo Electron Limited
  • 当前专利权人: Tokyo Electron Limited
  • 当前专利权人地址: JP Tokyo
  • 代理机构: Pearne & Gordon LLP
  • 优先权: JP2009-149697 20090624
  • 主分类号: G06Q40/00
  • IPC分类号: G06Q40/00
Particle generation factor determining system, charging method and storage medium
摘要:
Provided is a charging method capable of offering a user an incentive to use a particle generation factor determining system. In the particle generation factor determining system including a user interface device 11 through which a user inputs a particle map and a server 13, the server 13 calculates accuracy of each of multiple particle generation factors based on the particle map; the user interface device 11 displays the calculated accuracy or a title of generation-factor-relevant information 27 on each particle generation factor corresponding to this accuracy; the server 13 provides the generation-factor-relevant information 27 to the user interface device 11; a charged fee for providing particle generation-factor-relevant information 27 is determined based on accuracy of a particle generation factor corresponding to the provided generation-factor-relevant information 27.
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