发明授权
- 专利标题: Substrate treatment apparatus and substrate treatment method
- 专利标题(中): 基板处理装置及基板处理方法
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申请号: US13045024申请日: 2011-03-10
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公开(公告)号: US08501025B2公开(公告)日: 2013-08-06
- 发明人: Akio Hashizume , Yuya Akanishi , Kenji Kawaguchi , Manabu Yamamoto
- 申请人: Akio Hashizume , Yuya Akanishi , Kenji Kawaguchi , Manabu Yamamoto
- 申请人地址: JP
- 专利权人: Dainippon Screen Mfg. Co., Ltd.
- 当前专利权人: Dainippon Screen Mfg. Co., Ltd.
- 当前专利权人地址: JP
- 代理机构: Ostrolenk Faber LLP
- 优先权: JP2010-082247 20100331; JP2010-082248 20100331
- 主分类号: C03C15/00
- IPC分类号: C03C15/00
摘要:
A substrate treatment apparatus is provided, which includes: a seal chamber including a chamber body having an opening, a lid member provided rotatably with respect to the chamber body and configured to close the opening, and a first liquid seal structure which liquid-seals between the lid member and the chamber body, the seal chamber having an internal space sealed from outside; a lid member rotating unit which rotates the lid member; a substrate holding/rotating unit which holds and rotates a substrate in the internal space of the seal chamber; and a treatment liquid supplying unit which supplies a treatment liquid to the substrate rotated by the substrate holding/rotating unit.
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