Invention Grant
- Patent Title: Resistive memory device and manufacturing method thereof and operating method thereof
- Patent Title (中): 电阻式存储器件及其制造方法及其操作方法
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Application No.: US12574938Application Date: 2009-10-07
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Publication No.: US08501574B2Publication Date: 2013-08-06
- Inventor: Kuo-Pin Chang , Hang-Ting Lue , Cheng-Hung Tsai
- Applicant: Kuo-Pin Chang , Hang-Ting Lue , Cheng-Hung Tsai
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
A method of manufacturing resistive memory includes the steps: forming a first implanted stacked structure having a first impurity diffusion layer, a second impurity diffusion layer, and a third impurity diffusion layer in a substrate; etching at least the first implanted stacked structure to form a plurality of second implanted stacked structures, wherein the first impurity diffusion layers are first signal lines; forming a plurality of first insulating layers between the second implanted stacked structures; etching the second implanted stacked structures to form a plurality of third implanted stacked structures, wherein the first signal lines are not etched; forming a plurality of second insulating layers between the third implanted stacked structures; forming a plurality of memory material layers electrically coupled to the third impurity diffusion layers; and forming a plurality of second signal lines perpendicular to the first signal lines and electrically coupled to the memory material layers.
Public/Granted literature
- US20110080766A1 Resistive Memory Device and Manufacturing Method Thereof and Operating Method Thereof Public/Granted day:2011-04-07
Information query
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