发明授权
- 专利标题: Resistive memory device and manufacturing method thereof and operating method thereof
- 专利标题(中): 电阻式存储器件及其制造方法及其操作方法
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申请号: US12574938申请日: 2009-10-07
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公开(公告)号: US08501574B2公开(公告)日: 2013-08-06
- 发明人: Kuo-Pin Chang , Hang-Ting Lue , Cheng-Hung Tsai
- 申请人: Kuo-Pin Chang , Hang-Ting Lue , Cheng-Hung Tsai
- 申请人地址: TW Hsinchu
- 专利权人: Macronix International Co., Ltd.
- 当前专利权人: Macronix International Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: McClure, Qualey & Rodack, LLP
- 主分类号: H01L21/20
- IPC分类号: H01L21/20
摘要:
A method of manufacturing resistive memory includes the steps: forming a first implanted stacked structure having a first impurity diffusion layer, a second impurity diffusion layer, and a third impurity diffusion layer in a substrate; etching at least the first implanted stacked structure to form a plurality of second implanted stacked structures, wherein the first impurity diffusion layers are first signal lines; forming a plurality of first insulating layers between the second implanted stacked structures; etching the second implanted stacked structures to form a plurality of third implanted stacked structures, wherein the first signal lines are not etched; forming a plurality of second insulating layers between the third implanted stacked structures; forming a plurality of memory material layers electrically coupled to the third impurity diffusion layers; and forming a plurality of second signal lines perpendicular to the first signal lines and electrically coupled to the memory material layers.
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