发明授权
- 专利标题: Apparatus for optical inspection
- 专利标题(中): 光学检测仪器
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申请号: US13051874申请日: 2011-03-18
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公开(公告)号: US08502967B2公开(公告)日: 2013-08-06
- 发明人: Cooper S. K. Kuo , Ron Tsai , Steven Lee
- 申请人: Cooper S. K. Kuo , Ron Tsai , Steven Lee
- 申请人地址: TW New Taipai
- 专利权人: Cooper S. K. Kuo
- 当前专利权人: Cooper S. K. Kuo
- 当前专利权人地址: TW New Taipai
- 代理机构: Hershkovitz & Associates PLLC
- 代理商 Abe Hershkovitz
- 主分类号: G01N21/00
- IPC分类号: G01N21/00
摘要:
An apparatus for optical inspection comprises a platform extending in a first direction, a transmitting unit for transporting at least one carrier in the first direction from an input port to an output port thereof, each of the at least one carrier to support one of at least one object to be inspected, a first detector disposed above the platform and extending in a second direction orthogonal to the first direction for inspecting the at least one object on the at least one carrier, the first detector including a first scanner extending in the second direction between the input port and the output port, and a first roller set between the first scanner and the input port to apply force onto a surface of each of the at least one object.
公开/授权文献
- US20120194806A1 APPARATUS FOR OPTICAL INSPECTION 公开/授权日:2012-08-02
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