发明授权
- 专利标题: Vibration-actuated micro mirror device
- 专利标题(中): 振动微镜装置
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申请号: US13667093申请日: 2012-11-02
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公开(公告)号: US08508827B2公开(公告)日: 2013-08-13
- 发明人: Yu-Jen Wang , Chien-Shien Yeh , Chung-De Chen , Hung-Chung Li
- 申请人: Yu-Jen Wang , Chien-Shien Yeh , Chung-De Chen , Hung-Chung Li
- 申请人地址: TW Hsin-Chu
- 专利权人: Industrial Technology Research Institute
- 当前专利权人: Industrial Technology Research Institute
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: WPAT, PC
- 代理商 Justin King
- 优先权: TW99127428A 20100817
- 主分类号: G02B26/08
- IPC分类号: G02B26/08
摘要:
A vibration-actuated micro mirror device comprises a substrate, a swinging frame, a reflection mirror, and a vibration part. The swinging frame is rotatably arranged within a first accommodating space formed on the substrate. The reflection mirror is rotatably arranged within a second accommodating space formed on the swinging frame. The vibration part further comprises a plate coupled to the substrate, and a first and a second vibration structures. The first and the second vibration structures are coupled to the plate and are spaced a distance away from each other, wherein the first vibration structure receives a first driving signal having a first frequency and the second vibration structure receives a second driving signal having a second frequency smaller than the first frequency, thereby enabling the swinging frame to rotate about the first axis while enabling the reflection mirror to rotate about the second axis.
公开/授权文献
- US20130057936A1 VIBRATION-ACTUATED MICRO MIRROR DEVICE 公开/授权日:2013-03-07
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