发明授权
- 专利标题: Large volume evaporation source
- 专利标题(中): 大体积蒸发源
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申请号: US12228392申请日: 2008-08-12
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公开(公告)号: US08512806B2公开(公告)日: 2013-08-20
- 发明人: John Mariner , Douglas A. Longworth , Donald William Pultz, Jr. , Feng Liao , David M. Rusinko , Zhong-Hao Lu , Timothy J. Hejl
- 申请人: John Mariner , Douglas A. Longworth , Donald William Pultz, Jr. , Feng Liao , David M. Rusinko , Zhong-Hao Lu , Timothy J. Hejl
- 申请人地址: US NY Waterford
- 专利权人: Momentive Performance Materials Inc.
- 当前专利权人: Momentive Performance Materials Inc.
- 当前专利权人地址: US NY Waterford
- 代理商 Joseph E. Waters
- 主分类号: C23C16/00
- IPC分类号: C23C16/00
摘要:
A containment vessel for evaporating materials for use in applying film coatings to a substrate includes a body fabricated from a refractory material. In one embodiment the body includes end portions capable of being connected to other bodies in an end to end fashion. In another embodiment, the body includes an integral patterned conductor incorporated into the outer surface portion of the body to facilitate association with an electrical power source for heating.
公开/授权文献
- US20100040780A1 Large volume evaporation source 公开/授权日:2010-02-18
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