Invention Grant
US08514486B2 Drive laser for EUV light source 有权
驱动激光用于EUV光源

Drive laser for EUV light source
Abstract:
A device comprising a laser source producing a continuous output on a beam path and an amplifier is disclosed. The device further includes a partially transmissive, partially reflective optic disposed on said beam path between said laser source and said amplifier. The device further includes a droplet generator positioned to deliver a droplet moving on a path intersecting said beam path, the droplet reflecting light to establish an optical cavity with said optic.
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