Invention Grant
- Patent Title: Drive laser for EUV light source
- Patent Title (中): 驱动激光用于EUV光源
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Application No.: US12927012Application Date: 2010-11-03
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Publication No.: US08514486B2Publication Date: 2013-08-20
- Inventor: Alexander I. Ershov , Igor V. Fomenkov , Norbert R. Bowering , Jerzy R. Hoffman
- Applicant: Alexander I. Ershov , Igor V. Fomenkov , Norbert R. Bowering , Jerzy R. Hoffman
- Applicant Address: US CA San Diego
- Assignee: Cymer LLC
- Current Assignee: Cymer LLC
- Current Assignee Address: US CA San Diego
- Agency: Cymer LLC
- Main IPC: H01S3/00
- IPC: H01S3/00

Abstract:
A device comprising a laser source producing a continuous output on a beam path and an amplifier is disclosed. The device further includes a partially transmissive, partially reflective optic disposed on said beam path between said laser source and said amplifier. The device further includes a droplet generator positioned to deliver a droplet moving on a path intersecting said beam path, the droplet reflecting light to establish an optical cavity with said optic.
Public/Granted literature
- US20110058588A1 Drive laser for EUV light source Public/Granted day:2011-03-10
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