Described is a method of fabricating an optical fiber preform that includes a deep index trench comprising a shallower outer trench portion formed on a substrate tube and a deeper inner trench portion formed on the shallower outer trench portion. Each of the shallower outer trench and deeper inner trench portions comprises multiple silica layers. The method comprises the steps of: (1) forming each layer of the shallower outer trench portion in a single-pass deposition of a F-containing silica layer; and (2) forming each layer of the deeper inner portion in a double-pass deposition in which, in a first pass, a layer of silica soot is deposited and then, in a second pass, the soot is sintered in the presence of SiF4.