发明授权
- 专利标题: Split laser scribe
- 专利标题(中): 分割激光刻章
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申请号: US12731798申请日: 2010-03-25
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公开(公告)号: US08519298B2公开(公告)日: 2013-08-27
- 发明人: Jianmin Wang , Craig Metzner , Gregory W. Schuh
- 申请人: Jianmin Wang , Craig Metzner , Gregory W. Schuh
- 申请人地址: US NY Plainview
- 专利权人: Veeco Instruments, Inc.
- 当前专利权人: Veeco Instruments, Inc.
- 当前专利权人地址: US NY Plainview
- 代理机构: HolzerIPLaw, PC
- 主分类号: B23K26/00
- IPC分类号: B23K26/00 ; B23K26/14 ; B23K26/02
摘要:
A dual-beam laser cutting system uses laser beam polarization to output two identical laser beams. The dual identical laser beams are spaced appropriately to simultaneously cut a water thus increasing the laser cutting system's throughput as compared to a single-laser cutting system. In one implementation, the dual-beam laser cutting system 100 utilizes a beam expander 220, two half-wave plates 224, 238, a polarizing beam splitter 228, a mirror 236, and two lenses 234, 242 to provide two identical laser beams 202, 204 from a single laser source 214. The identical laser beams 202, 204 are tuned to have the same power, cross-sectional diameter, and polarization direction. One of the half-wave plates 224 is rotated to yield laser beams with the same power. The other half-wave plate 238 is rotated to yield laser beams with the same polarization direction.
公开/授权文献
- US20110233176A1 SPLIT LASER SCRIBE 公开/授权日:2011-09-29
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