Invention Grant
US08519449B2 Thin-film transistor based piezoelectric strain sensor and method
有权
基于薄膜晶体管的压电应变传感器及方法
- Patent Title: Thin-film transistor based piezoelectric strain sensor and method
- Patent Title (中): 基于薄膜晶体管的压电应变传感器及方法
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Application No.: US12842298Application Date: 2010-07-23
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Publication No.: US08519449B2Publication Date: 2013-08-27
- Inventor: Viorel-Georgel Dumitru , Cornel Cobianu , Stefan-Dan Costea , Bogdan-Catalin Serban
- Applicant: Viorel-Georgel Dumitru , Cornel Cobianu , Stefan-Dan Costea , Bogdan-Catalin Serban
- Applicant Address: US NJ Morristown
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morristown
- Agent Kermit D. Lopez; Luis M. Ortiz; Kevin Sooles
- Main IPC: H01L29/84
- IPC: H01L29/84

Abstract:
A piezoelectric strain sensor and method thereof for detecting strain, vibration, and/or pressure. The sensor incorporates a sequence of piezoelectric and semiconductor layers in a thin-film transistor structure. The thin-film transistor structure can be configured on a flexible substrate via a low-cost fabrication technique. The piezoelectric layer generates an electric charge resulting in a modulation of a transistor current, which is a measure of external strain. The sensor can be formed as a single gate field-effect piezoelectric sensor and a dual gate field-effect piezoelectric sensor. The semiconductor layer can be configured from a nanowire array resulting in a metal-piezoelectric-nanowire field effect transistor. The single and dual gate field-effect piezoelectric sensor offer increased sensitivity and device control due to the presence of the piezoelectric layer in the transistor structure and low cost manufacturability on large area flexible substrates.
Public/Granted literature
- US20110049579A1 THIN-FILM TRANSISTOR BASED PIEZOELECTRIC STRAIN SENSOR AND METHOD Public/Granted day:2011-03-03
Information query
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