Abstract:
Chemical sensors such as carbon dioxide sensors and methods for making such sensors are disclosed. An example carbon dioxide sensor may include a substrate, with a sensing beam supported by the substrate. The sensing beam may be configured to resonant. A sensing layer may be disposed on the sensing beam, wherein the sensing layer may include an amino group and is configured to sense carbon dioxide. In some instances, a reference beam may also be supported by the substrate, and may be configured to resonant. A reference layer may be disposed on the reference beam, wherein the reference layer may includes an amino group that has been poisoned so that it will be substantially non-sensitive to carbon dioxide.
Abstract:
An apparatus includes a sensor that receives a first electrical signal and provides a second electrical signal in response to the first electrical signal. The second electrical signal is based on at least one parameter monitored by the sensor. The apparatus also includes an antenna that converts first wireless signals into the first electrical signal and that converts the second electrical signal into second wireless signals. The antenna includes a substrate, conductive traces, and conductive interconnects. The conductive traces are formed on first and second surfaces of the substrate. The conductive interconnects couple the conductive traces, and the conductive interconnects and the conductive traces form at least one helical arm of the antenna. The conductive traces could be formed in various ways, such as by etching or direct printing. The conductive interconnects could also be formed in various ways, such as by filling vias in the substrate or direct printing.
Abstract:
An all-differential resonant nanosensor apparatus for detecting multiple gasses and method of fabricating the same. The nanosensor apparatus generally includes a sensing loop, a reference loop, and a mixer. A sensing self assembled monolayer (SAM) or an ultrathin solid monolayer may be deposited on a sensing resonant beam associated with the sensing loop to detect the presence of the gas. A reference self assembled monolayer or an ultrathin solid film may be deposited on a reference resonant beam that possess similar visco-elastic properties (e.g., temperature, humidity and aging) as the sensing monolayer with no sensing properties. A differential reading electronic circuit may be interconnected with each resonant beam pair for signal processing. A drift-free frequency signal per each gas may be obtained by subtracting the frequency response from the sensing loop and the reference loop.
Abstract:
A method includes forming multiple trenches in a first wafer, forming a sensor structure on a first surface of a second wafer, and bonding the first wafer and the second wafer. The method also includes etching a second surface of the second wafer to form a sensor diaphragm in the second wafer. The method further includes removing a portion of the first wafer by cutting the first wafer in multiple areas of the first wafer associated with the trenches. A sensor includes a substrate and a surface acoustic wave (SAW) resonator on a first surface of the substrate. The sensor also includes a bonding pad electrically coupled to the SAW resonator and a notch formed in a second surface of the substrate. The sensor further includes a cover separated from the first surface of the substrate by a spacer. The SAW resonator is located between the cover and the substrate.
Abstract:
A SAW based sensor apparatus utilizing semi-synchronous SAW resonator having a single resonance at Bragg frequency with very high quality factor is disclosed. The semi-synchronous SAW resonator includes at least one inter-digital transducer, which generates and receives surface acoustic wave and a number of grating reflectors, which reflect the surface acoustic wave and generate a standing wave between the reflectors, The interdigital transducer and the grating reflectors can be fabricated on a substrate (e.g., quartz) by photolithographic process. The resonance condition is independent of transducer directivity and reflection coefficient per finger. Such a SAW based sensor apparatus having three semi-synchronous SAW resonators can be utilized for measuring pressure and temperature for a wireless tire-pressure monitoring system.
Abstract:
A glass cover wafer is bonded to a quartz SAW using glass frit technology, such that the glass wafer and glass frit formulation provides a thermal coefficient of expansion (TCE) of glass that fits the average TCE of the quartz in two perpendicular directions in a unique package. A dicing technology is used for chip separation. The sensor back side and the shaft are attached with a glass glue that transitions the TCE from the shaft to the quartz without interposing a large amount of the glue.
Abstract:
A multifunctional multichip system can operate in a passive mode by using at least one antenna to receive electromagnetic energy and using that energy to perform system functions. The system includes a sensor, an impedance matching circuit and an RFID module. The sensor produces a sensor signal containing a measurement. The RFID can produce an identification signal containing identification information. Alternatively, the RFID chip can be used in an addressing mode wherein the system only produces a signal in response to an addressing signal containing addressing information. The addressing signal is received from the electromagnetic field. In either mode, the sensor signal is coupled from the antenna into the electromagnetic field from which a receiver can obtain it. The signal can contain the identification information as well as the measurement. A matching network minimizes the effects of impedance mismatches between the system elements.
Abstract:
An apparatus includes a sensor that receives a first electrical signal and provides a second electrical signal in response to the first electrical signal. The second electrical signal is based on at least one parameter monitored by the sensor. The apparatus also includes an antenna that converts first wireless signals into the first electrical signal and that converts the second electrical signal into second wireless signals. The antenna includes a substrate, conductive traces, and conductive interconnects. The conductive traces are formed on first and second surfaces of the substrate. The conductive interconnects couple the conductive traces, and the conductive interconnects and the conductive traces form at least one helical arm of the antenna. The conductive traces could be formed in various ways, such as by etching or direct printing. The conductive interconnects could also be formed in various ways, such as by filling vias in the substrate or direct printing.
Abstract:
A system for detection of stress and deformation in a structural asset, for instance, one of reinforced concrete. An area on the asset may have a structure interface, such as a patch, attached to it with a fastening mechanism which may be a layer of an epoxy or other material, or be items such as screws, bolts, welds, or the like. One or more surface acoustic wave (SAW) strain sensors may be attached to the interface with an adhesive layer of epoxy or other material, or with mechanical items. Stress may be transmitted by the interface to the strain sensors. The sensors may be interrogated with a wire or wireless reader to obtain strain measurements. The measurements may indicate stress and deformations such as bulges and breaks in the asset. The measurements may also be a basis for determining location and extent of the stress and deformations.
Abstract:
A differential resonant sensor apparatus and method for detecting relative humidity in an ambient air. The apparatus generally includes a sensing loop, a reference loop and a mixer. A hydrophilic sensing layer can be deposited on a sensing resonant beam and a corresponding hydrophobic reference layer can be deposited on a reference resonant beam for detecting water vapor concentration in the ambient air. The hydrophobic reference layer possesses similar visco-elastic properties as the hydrophilic sensing layer with no water absorption properties. A differential reading electronic circuit may be interconnected with each resonant beam for signal processing. The absorbed humidity with respect to the sensing resonant beam changes the mechanical resonance frequency, which can be detected as a change in the electric resonance frequency of the associated electronic circuit.