发明授权
US08519543B1 Large sized silicon interposers overcoming the reticle area limitations
有权
大尺寸硅插入器克服了掩模版面积的局限性
- 专利标题: Large sized silicon interposers overcoming the reticle area limitations
- 专利标题(中): 大尺寸硅插入器克服了掩模版面积的局限性
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申请号: US13551466申请日: 2012-07-17
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公开(公告)号: US08519543B1公开(公告)日: 2013-08-27
- 发明人: Haoyu Song , Cao Wei , Rui Niu , Anwar A. Mohammed
- 申请人: Haoyu Song , Cao Wei , Rui Niu , Anwar A. Mohammed
- 申请人地址: US TX Plano
- 专利权人: Futurewei Technologies, Inc.
- 当前专利权人: Futurewei Technologies, Inc.
- 当前专利权人地址: US TX Plano
- 代理商 Robert D. McCutcheon
- 主分类号: H01L23/48
- IPC分类号: H01L23/48
摘要:
A multi-die integrated circuit assembly includes an interposer substrate larger than the typical reticle size used in fabricating the “active area” in which the through-silicon vias (TSVs) and interconnect conductors are formed in the interposer. At the same time, each of the dies has its external power/ground and I/O signal line connections concentrated into a smaller area of the die. The dies are disposed or mounted on the interposer such that these smaller areas (with the power/ground/IO connections) overlap with the active area of the interposer. In this configuration, a plurality of dies having a combined area substantially greater than the active area of the interposer can be mounted on the interposer (and take advantage of the active area for interconnections).
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