Invention Grant
US08520217B2 Talbot interferometer, its adjustment method, and measurement method
有权
Talbot干涉仪,其调整方法和测量方法
- Patent Title: Talbot interferometer, its adjustment method, and measurement method
- Patent Title (中): Talbot干涉仪,其调整方法和测量方法
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Application No.: US12765037Application Date: 2010-04-22
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Publication No.: US08520217B2Publication Date: 2013-08-27
- Inventor: Toshiyuki Naoi , Seima Kato , Naoki Kohara , Chidane Ouchi
- Applicant: Toshiyuki Naoi , Seima Kato , Naoki Kohara , Chidane Ouchi
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2009-103777 20090422
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G01B9/02

Abstract:
A Talbot interferometer includes a diffraction grating, an image pickup device, a moving unit configured to move at least one of the diffraction grating and the image pickup device in an optical axis direction of the test object, and a computer configured to adjust a position of the at least one of the diffraction grating and the image pickup device using the moving unit so that a Talbot condition can be met, based on a spatial frequency spectrum obtained from a plurality of interference fringes captured by the image pickup device while moving the at least one of the diffraction grating and the image pickup device using the moving unit.
Public/Granted literature
- US20100271636A1 TALBOT INTERFEROMETER, ITS ADJUSTMENT METHOD, AND MEASUREMENT METHOD Public/Granted day:2010-10-28
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