Invention Grant
- Patent Title: Process and system for fabrication of patterns on a surface
- Patent Title (中): 用于在表面上制作图案的工艺和系统
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Application No.: US13003484Application Date: 2009-07-03
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Publication No.: US08524100B2Publication Date: 2013-09-03
- Inventor: Graham L. W. Cross , Warren McKenzie , John B. Pethica
- Applicant: Graham L. W. Cross , Warren McKenzie , John B. Pethica
- Applicant Address: IE Dublin
- Assignee: The Provost Fellows and Scholars of the College of the Holy and Undivided Trinity of Queen Elizabeth, near Dublin
- Current Assignee: The Provost Fellows and Scholars of the College of the Holy and Undivided Trinity of Queen Elizabeth, near Dublin
- Current Assignee Address: IE Dublin
- Agency: K&L Gates LLP
- Priority: EP08104722 20080711
- International Application: PCT/EP2009/004846 WO 20090703
- International Announcement: WO2010/003600 WO 20100114
- Main IPC: C03C15/00
- IPC: C03C15/00

Abstract:
The invention provides a system and process of patterning structures on a carbon based surface comprising exposing part of the surface to an ion flux, such that material properties of the exposed surface are modified to provide a hard mask effect on the surface. A further step of etching unexposed parts of the surface forms the structures on the surface. The inventors have discovered that by controlling the ion exposure, alteration of the surface structure at the top surface provides a mask pattern, without substantially removing any material from the exposed surface. The mask allows for subsequent ion etching of unexposed areas of the surface leaving the exposed areas raised relative to the unexposed areas thus manufacturing patterns onto the surface. For example, a Ga+ focussed ion beam exposes a pattern onto a diamond surface which produces such a pattern after its exposure to a plasma etch. The invention is particularly suitable for patterning of clear well-defined structures down to nano-scale dimensions.
Public/Granted literature
- US20110189446A1 Process and System for Fabrication of Patterns on a Surface Public/Granted day:2011-08-04
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