发明授权
- 专利标题: Method for manufacturing susceptor
- 专利标题(中): 感受器制造方法
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申请号: US12635815申请日: 2009-12-11
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公开(公告)号: US08524103B2公开(公告)日: 2013-09-03
- 发明人: Hideki Arai , Masayoshi Yajima , Kunihiko Suzuki
- 申请人: Hideki Arai , Masayoshi Yajima , Kunihiko Suzuki
- 申请人地址: JP Shizuoka-ken
- 专利权人: NuFlare Technology, Inc.
- 当前专利权人: NuFlare Technology, Inc.
- 当前专利权人地址: JP Shizuoka-ken
- 代理机构: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- 优先权: JP2008-333544 20081226
- 主分类号: C23F1/00
- IPC分类号: C23F1/00 ; C03C15/00 ; C03C25/68 ; C25F3/00
摘要:
A method for manufacturing a susceptor includes: forming a concave pattern in a surface of a substrate to be processed; applying a SiC paste containing a SiC powder and a sintering agent to the surface of the substrate to be processed to fill the concave pattern to form a SiC coating layer; laminating a SiC substrate on the SiC coating layer; and firing the SiC coating layer to form a SiC layer having at least one convex section on the surface of the SiC substrate.
公开/授权文献
- US20100163524A1 METHOD FOR MANUFACTURING SUSCEPTOR 公开/授权日:2010-07-01
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