Invention Grant
US08524588B2 Method of forming a single metal that performs N work function and P work function in a high-k/metal gate process
有权
在高k /金属栅极工艺中形成执行N功函数和P功函数的单一金属的方法
- Patent Title: Method of forming a single metal that performs N work function and P work function in a high-k/metal gate process
- Patent Title (中): 在高k /金属栅极工艺中形成执行N功函数和P功函数的单一金属的方法
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Application No.: US12492889Application Date: 2009-06-26
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Publication No.: US08524588B2Publication Date: 2013-09-03
- Inventor: Yih-Ann Lin , Ryan Chia-Jen Chen , Donald Y. Chao , Yi-Shien Mor , Kuo-Tai Huang
- Applicant: Yih-Ann Lin , Ryan Chia-Jen Chen , Donald Y. Chao , Yi-Shien Mor , Kuo-Tai Huang
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L21/3205
- IPC: H01L21/3205 ; H01L21/4763

Abstract:
The present disclosure provides a method of fabricating a semiconductor device. The method includes forming a gate dielectric over a semiconductor substrate, forming a capping layer over or under the gate dielectric, forming a metal layer over the capping layer, the metal layer having a first work function, treating a portion of the metal layer such that a work function of the portion of the metal layer changes from the first work function to a second work function, and forming a first metal gate from the untreated portion of the metal layer having the first work function and forming a second metal gate from the treated portion of the metal layer having the second work function.
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