发明授权
- 专利标题: Semiconductor device
- 专利标题(中): 半导体器件
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申请号: US12299542申请日: 2007-05-07
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公开(公告)号: US08525229B2公开(公告)日: 2013-09-03
- 发明人: Yasuhiro Okamoto , Yuji Ando , Takashi Inoue , Tatsuo Nakayama , Hironobu Miyamoto
- 申请人: Yasuhiro Okamoto , Yuji Ando , Takashi Inoue , Tatsuo Nakayama , Hironobu Miyamoto
- 申请人地址: JP Kanagawa
- 专利权人: Renesas Electronics Corporation
- 当前专利权人: Renesas Electronics Corporation
- 当前专利权人地址: JP Kanagawa
- 代理机构: Young & Thompson
- 优先权: JP2006-129322 20060508
- 国际申请: PCT/JP2007/000482 WO 20070507
- 国际公布: WO2007/129471 WO 20071115
- 主分类号: H01L29/205
- IPC分类号: H01L29/205 ; H01L29/778
摘要:
A semiconductor device includes a channel layer, an electron-supplying layer provided on the channel layer, a cap layer provided on the electron-supplying layer and creating lattice match with the channel layer, and ohmic electrodes provided on the cap layer. The cap layer has a composition of (InyAl1-y)zGa1-zN (0≦y≦1, 0≦z≦1). The z for such cap layer monotonically decreases as being farther away from the electron-supplying layer.
公开/授权文献
- US20100230684A1 SEMICONDUCTOR DEVICE 公开/授权日:2010-09-16
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