发明授权
US08525606B2 Vibrator element, vibrator, oscillator, and electronic device 有权
振动元件,振动器,振荡器和电子设备

Vibrator element, vibrator, oscillator, and electronic device
摘要:
A vibrator element includes: a base portion; and three vibrating arms that extend from the base portion in the Y axis direction. The vibrating arms are arranged in the X axis direction, include excitation electrodes on a principal face, and vibrate in the Z axis direction. When an arm width of the vibrating arm, which is located at the center of the arrangement, in the X axis direction is W1, each arm width of the other vibrating arms in the X axis direction is W, an electrode width of the excitation electrode of the vibrating arm, which is located at the center of the arrangement, in the X axis direction is A1, and each electrode width of the excitation electrodes of the other vibrating arms in the X axis direction is A, 1.35
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