发明授权
- 专利标题: Vibrator element, vibrator, oscillator, and electronic device
- 专利标题(中): 振动元件,振动器,振荡器和电子设备
-
申请号: US13363483申请日: 2012-02-01
-
公开(公告)号: US08525606B2公开(公告)日: 2013-09-03
- 发明人: Takashi Yamazaki
- 申请人: Takashi Yamazaki
- 申请人地址: JP
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: JP2011-020414 20110202
- 主分类号: H01L41/053
- IPC分类号: H01L41/053 ; H03B5/32 ; H03H9/24
摘要:
A vibrator element includes: a base portion; and three vibrating arms that extend from the base portion in the Y axis direction. The vibrating arms are arranged in the X axis direction, include excitation electrodes on a principal face, and vibrate in the Z axis direction. When an arm width of the vibrating arm, which is located at the center of the arrangement, in the X axis direction is W1, each arm width of the other vibrating arms in the X axis direction is W, an electrode width of the excitation electrode of the vibrating arm, which is located at the center of the arrangement, in the X axis direction is A1, and each electrode width of the excitation electrodes of the other vibrating arms in the X axis direction is A, 1.35
公开/授权文献
信息查询
IPC分类: