发明授权
US08525994B2 Periodic patterns and technique to control misaligment between two layers
有权
周期性模式和技术来控制两层之间的错配
- 专利标题： Periodic patterns and technique to control misaligment between two layers
- 专利标题（中）： 周期性模式和技术来控制两层之间的错配
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申请号： US12428401申请日： 2009-04-22
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公开(公告)号： US08525994B2公开(公告)日： 2013-09-03
- 发明人: Ibrahim Abdulhalim , Mike Adel , Michael Friedmann , Michael Faeyrman
- 申请人： Ibrahim Abdulhalim , Mike Adel , Michael Friedmann , Michael Faeyrman
- 申请人地址： US CA Milpitas
- 专利权人： KLA-Tencor Corporation
- 当前专利权人： KLA-Tencor Corporation
- 当前专利权人地址： US CA Milpitas
- 代理机构： Davis Wright Tremaine LLP
- 主分类号： G01B11/00
- IPC分类号： G01B11/00
摘要：
A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
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