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公开(公告)号：US20060065625A1
公开(公告)日：2006-03-30
申请号：US11281820
申请日：2005-11-16
IPC分类号： H01L21/306 , G01L21/30
CPC分类号： G01B11/26 , G01B11/14 , G01N21/9501 , G03F7/70633 , H01L22/12 , H01L23/544 , H01L2223/54426 , H01L2223/54453 , H01L2223/5446 , H01L2924/0002 , H01L2924/00
摘要： A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
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公开(公告)号：US20060132807A1
公开(公告)日：2006-06-22
申请号：US11355613
申请日：2006-02-15
IPC分类号： G01B11/14
CPC分类号： G01B11/26 , G01B11/14 , G01N21/9501 , G03F7/70633 , H01L22/12 , H01L23/544 , H01L2223/54426 , H01L2223/54453 , H01L2223/5446 , H01L2924/0002 , H01L2924/00
摘要： A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
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公开(公告)号：US20050208685A1
公开(公告)日：2005-09-22
申请号：US11125590
申请日：2005-05-09
IPC分类号： G01B11/00 , G03F7/20 , G03F9/00 , H01L21/027 , H01L23/544 , H01L21/76
CPC分类号： G01B11/26 , G01B11/14 , G01N21/9501 , G03F7/70633 , H01L22/12 , H01L23/544 , H01L2223/54426 , H01L2223/54453 , H01L2223/5446 , H01L2924/0002 , H01L2924/00
摘要： A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying, or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
摘要翻译： 提出了一种测量两个上覆或隔行周期结构之间的对准误差的方法和系统。 覆盖或隔行的周期性结构被入射辐射照射，并且检测由上覆或隔行的周期性结构引起的入射辐射的衍射辐射以提供输出信号。 然后可以从输出信号确定上覆或隔行周期性结构之间的未对准。
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公开(公告)号：US08570515B2
公开(公告)日：2013-10-29
申请号：US12628092
申请日：2009-11-30
CPC分类号： G01B11/26 , G01B11/14 , G01N21/9501 , G03F7/70633 , H01L22/12 , H01L23/544 , H01L2223/54426 , H01L2223/54453 , H01L2223/5446 , H01L2924/0002 , H01L2924/00
摘要： A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
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公开(公告)号：US20060262326A1
公开(公告)日：2006-11-23
申请号：US11495001
申请日：2006-07-27
IPC分类号： G01B11/14
CPC分类号： G01B11/26 , G01B11/14 , G01N21/9501 , G03F7/70633 , H01L22/12 , H01L23/544 , H01L2223/54426 , H01L2223/54453 , H01L2223/5446 , H01L2924/0002 , H01L2924/00
摘要： A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
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6.发明授权公开(公告)号：US08525994B2
公开(公告)日：2013-09-03
申请号：US12428401
申请日：2009-04-22
IPC分类号： G01B11/00
CPC分类号： G01B11/26 , G01B11/14 , G01N21/9501 , G03F7/70633 , H01L22/12 , H01L23/544 , H01L2223/54426 , H01L2223/54453 , H01L2223/5446 , H01L2924/0002 , H01L2924/00
摘要： A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
摘要翻译： 提出了一种测量两个上覆或隔行周期结构之间的对准误差的方法和系统。 覆盖或隔行的周期性结构被入射辐射照射，并且检测由上覆或隔行的周期性结构引起的入射辐射的衍射辐射以提供输出信号。 然后可以从输出信号确定上覆或隔行周期性结构之间的未对准。
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7.发明申请公开(公告)号：US20100073688A1
公开(公告)日：2010-03-25
申请号：US12628092
申请日：2009-11-30
IPC分类号： G01B11/14
CPC分类号： G01B11/26 , G01B11/14 , G01N21/9501 , G03F7/70633 , H01L22/12 , H01L23/544 , H01L2223/54426 , H01L2223/54453 , H01L2223/5446 , H01L2924/0002 , H01L2924/00
摘要： A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
摘要翻译： 提出了一种测量两个上覆或隔行周期结构之间的对准误差的方法和系统。 覆盖或隔行的周期性结构被入射辐射照射，并且检测由上覆或隔行的周期性结构引起的入射辐射的衍射辐射以提供输出信号。 然后可以从输出信号确定上覆或隔行周期性结构之间的未对准。
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8.发明申请公开(公告)号：US20070127025A1
公开(公告)日：2007-06-07
申请号：US11673115
申请日：2007-02-09
IPC分类号： G01B11/00
CPC分类号： G01B11/26 , G01B11/14 , G01N21/9501 , G03F7/70633 , H01L22/12 , H01L23/544 , H01L2223/54426 , H01L2223/54453 , H01L2223/5446 , H01L2924/0002 , H01L2924/00
摘要： A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
摘要翻译： 提出了一种测量两个上覆或隔行周期结构之间的对准误差的方法和系统。 覆盖或隔行的周期性结构被入射辐射照射，并且检测由上覆或隔行的周期性结构引起的入射辐射的衍射辐射以提供输出信号。 然后可以从输出信号确定上覆或隔行周期性结构之间的未对准。
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9.发明授权公开(公告)号：US07656528B2
公开(公告)日：2010-02-02
申请号：US11673115
申请日：2007-02-09
IPC分类号： G01B11/00
CPC分类号： G01B11/26 , G01B11/14 , G01N21/9501 , G03F7/70633 , H01L22/12 , H01L23/544 , H01L2223/54426 , H01L2223/54453 , H01L2223/5446 , H01L2924/0002 , H01L2924/00
摘要： A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
摘要翻译： 提出了一种测量两个上覆或隔行周期结构之间的对准误差的方法和系统。 覆盖或隔行的周期性结构被入射辐射照射，并且检测由上覆或隔行的周期性结构引起的入射辐射的衍射辐射以提供输出信号。 然后可以从输出信号确定上覆或隔行周期性结构之间的未对准。
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10.发明申请公开(公告)号：US20090231584A1
公开(公告)日：2009-09-17
申请号：US12428401
申请日：2009-04-22
IPC分类号： G01B11/00
CPC分类号： G01B11/26 , G01B11/14 , G01N21/9501 , G03F7/70633 , H01L22/12 , H01L23/544 , H01L2223/54426 , H01L2223/54453 , H01L2223/5446 , H01L2924/0002 , H01L2924/00
摘要： A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
摘要翻译： 提出了一种测量两个上覆或隔行周期结构之间的对准误差的方法和系统。 覆盖或隔行的周期性结构被入射辐射照射，并且检测由上覆或隔行的周期性结构引起的入射辐射的衍射辐射以提供输出信号。 然后可以从输出信号确定上覆或隔行周期性结构之间的未对准。
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