Invention Grant
- Patent Title: Positive photosensitive resin composition, cured film, protective film, interlayer insulating film, and semiconductor device and display element using the same
- Patent Title (中): 正型感光性树脂组合物,固化膜,保护膜,层间绝缘膜,以及使用其的显示元件
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Application No.: US13321180Application Date: 2009-05-20
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Publication No.: US08530119B2Publication Date: 2013-09-10
- Inventor: Takashi Hirano , Toshio Banba , Shusaku Okamyo , Hiroaki Makabe
- Applicant: Takashi Hirano , Toshio Banba , Shusaku Okamyo , Hiroaki Makabe
- Applicant Address: JP Tokyo
- Assignee: Sumitomo Bakelite Co., Ltd.
- Current Assignee: Sumitomo Bakelite Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- International Application: PCT/JP2009/059639 WO 20090520
- International Announcement: WO2010/134207 WO 20101125
- Main IPC: G03F7/023
- IPC: G03F7/023

Abstract:
A positive photosensitive resin composition includes (A) a polybenzoxazole precursor resin, (B) a photosensitive diazoquinone compound, (C) a hindered phenol antioxidant shown by the following general formula (1), and (D) a phenol compound shown by the following general formula (2). Formula (1) is: wherein R1 represents a hydrogen atom or an organic group having 1 to 4 carbon atoms, a is an integer from 1 to 3, and b is an integer from 1 to 3. Formula (2) is: wherein R2 represents a methylene group or a single bond, c is an integer from 1 to 3, and d is an integer from 1 to 3. A protective film, an interlayer insulating film, and a semiconductor device and a display element using the same are also disclosed.
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