发明授权
US08530954B2 Non-volatile memory devices including first and second blocking layer patterns
有权
包括第一和第二阻挡层图案的非易失性存储器件
- 专利标题: Non-volatile memory devices including first and second blocking layer patterns
- 专利标题(中): 包括第一和第二阻挡层图案的非易失性存储器件
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申请号: US12491529申请日: 2009-06-25
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公开(公告)号: US08530954B2公开(公告)日: 2013-09-10
- 发明人: Dong-Hyun Kim , Chang-Jin Kang
- 申请人: Dong-Hyun Kim , Chang-Jin Kang
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec
- 优先权: KR2006-131603 20061221
- 主分类号: H01L29/792
- IPC分类号: H01L29/792
摘要:
Non-volatile memory devices include a tunnel insulating layer on a channel region of a substrate, a charge-trapping layer pattern on the tunnel insulating layer and a first blocking layer pattern on the charge-trapping layer pattern. Second blocking layer patterns are on the tunnel insulating layer proximate sidewalls of the charge-trapping layer pattern. The second blocking layer patterns are configured to limit lateral diffusion of electrons trapped in the charge-trapping layer pattern. A gate electrode is on the first blocking layer pattern. The second blocking layer patterns may prevent lateral diffusion of the electrons trapped in the charge-trapping layer pattern.
公开/授权文献
- US20090261405A1 Non-Volatile Memory Devices 公开/授权日:2009-10-22
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