Invention Grant
- Patent Title: Microscopic total reflection measuring apparatus
- Patent Title (中): 微观全反射测量装置
-
Application No.: US12763311Application Date: 2010-04-20
-
Publication No.: US08531674B2Publication Date: 2013-09-10
- Inventor: Noriaki Soga , Hiroshi Sugiyama , Takayuki Sera , Jun Koshoubu
- Applicant: Noriaki Soga , Hiroshi Sugiyama , Takayuki Sera , Jun Koshoubu
- Applicant Address: JP Hachioji-shi, Tokyo
- Assignee: JASCO Corporation
- Current Assignee: JASCO Corporation
- Current Assignee Address: JP Hachioji-shi, Tokyo
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2009-135258 20090604
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01J3/00 ; G01J5/02

Abstract:
An object of the present invention is to provide a total reflection measuring apparatus which, while visually observing a specific minute area of a measurement object, is capable of efficiently obtaining optical data on the basis of the total reflection measurement. A microscopic total reflection measuring apparatus of the present invention comprises a Cassegrain mirror 12 having a Cassegrain primary mirror 16 and a Cassegrain secondary mirror 18, which condenses an incident light beam 30 on a measurement object 20 by making an incident light beam successively reflected by the secondary mirror 18 and the primary mirror 16, and which obtains a reflected light beam 32 from the measurement object 20 by making the reflected light beam 32 successively reflected by the primary mirror 16 and the secondary mirror 18. And, a total reflection prism 14 is arranged below the Cassegrain secondary mirror 18. And the incident light beam includes a visible light beam for visual observation and a measurement light beam for acquisition of analysis information, and present invention comprises a visible light filter which separates at least one of the incident light beam to the total reflection prism and the reflected light beam from the total reflection prism 14 into a total reflection area B and a normal reflection area A, and which removes, from the one of the incident light beam and the reflected light beam, the visible light beam in the total reflection area B.
Public/Granted literature
- US20100309455A1 Microscopic Total Reflection Measuring Apparatus Public/Granted day:2010-12-09
Information query