Invention Grant
US08531919B2 Flexible capacitive micromachined ultrasonic transducer array with increased effective capacitance
有权
灵活的电容式微机械超声换能器阵列具有增加的有效电容
- Patent Title: Flexible capacitive micromachined ultrasonic transducer array with increased effective capacitance
- Patent Title (中): 灵活的电容式微机械超声换能器阵列具有增加的有效电容
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Application No.: US12885798Application Date: 2010-09-20
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Publication No.: US08531919B2Publication Date: 2013-09-10
- Inventor: Ching-Hsiang Cheng , Chen Chao
- Applicant: Ching-Hsiang Cheng , Chen Chao
- Applicant Address: HK Hong Kong
- Assignee: The Hong Kong Polytechnic University
- Current Assignee: The Hong Kong Polytechnic University
- Current Assignee Address: HK Hong Kong
- Agency: Muncy, Geissler, Olds & Lowe, PLLC
- Main IPC: H01L41/08
- IPC: H01L41/08
Abstract:
A Capacitive Micromachined Ultrasonic Transducer (CMUT) having a membrane operatively connected to a top electrode and having a bottom electrode having a concave void. When a DC bias voltage is applied, the membrane is deflected towards the bottom electrode such that a peripheral edge region of the membrane is brought into close proximity with the bottom electrode and an electrostatic force proximal to the peripheral edge region of the membrane is increased.
Public/Granted literature
- US20110068654A1 FLEXIBLE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER ARRAY WITH INCREASED EFFECTIVE CAPACITANCE Public/Granted day:2011-03-24
Information query
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