发明授权
- 专利标题： Method of manufacturing organic light-emitting display device
- 专利标题（中）： 制造有机发光显示装置的方法
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申请号： US13183134申请日： 2011-07-14
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公开(公告)号： US08535995B2公开(公告)日： 2013-09-17
- 发明人: Jong-Hyun Park , Chun-Gi You , Sun Park , Yul-Kyu Lee , Sang-Ho Moon
- 申请人： Jong-Hyun Park , Chun-Gi You , Sun Park , Yul-Kyu Lee , Sang-Ho Moon
- 申请人地址： KR
- 专利权人： Samsung Display Co., Ltd.
- 当前专利权人： Samsung Display Co., Ltd.
- 当前专利权人地址： KR
- 代理机构： Knobbe Martens Olson & Bear, LLP
- 优先权： KR10-2011-0002763 20110111
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; H01L21/84 ; H01L23/52
摘要：
A method of manufacturing an organic light-emitting display device includes forming a silicon layer and a gate insulating film over a substrate having a transistor region and a capacitor region; forming a halftone photoresist over the substrate; patterning the silicon layer and the gate insulating film; forming a residual photoresist by subjecting the halftone photoresist to an ashing process to leave part of the halftone photoresist over the transistor region; and doping at least a portion of the silicon layer with impurities by applying the impurities over an entire region of the substrate.
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