- 专利标题： Method of growing electrical conductors
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申请号： US13153229申请日： 2011-06-03
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公开(公告)号： US08536058B2公开(公告)日： 2013-09-17
- 发明人: Juhana Kostamo , Pekka J. Soininen , Kai-Erik Elers , Suvi Haukka
- 申请人： Juhana Kostamo , Pekka J. Soininen , Kai-Erik Elers , Suvi Haukka
- 申请人地址： NL
- 专利权人： ASM International N.V.
- 当前专利权人： ASM International N.V.
- 当前专利权人地址： NL
- 代理机构： Knobbe, Martens, Olson & Bear, LLP
- 优先权： FI20001163 20000515
- 主分类号： H01L21/44
- IPC分类号： H01L21/44 ; H01L21/00
摘要：
A method for forming a conductive thin film includes depositing a metal oxide thin film on a substrate by an atomic layer deposition (ALD) process. The method further includes at least partially reducing the metal oxide thin film by exposing the metal oxide thin film to a reducing agent, thereby forming a seed layer. In one arrangement, the reducing agent comprises one or more organic compounds that contain at least one functional group selected from the group consisting of —OH, —CHO, and —COOH. In another arrangement, the reducing agent comprises an electric current.
公开/授权文献
- US20120028474A1 METHOD OF GROWING ELECTRICAL CONDUCTORS 公开/授权日：2012-02-02
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