发明授权
- 专利标题: Mirror actuator and beam irradiation device
- 专利标题(中): 镜面致动器和光束照射装置
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申请号: US13334745申请日: 2011-12-22
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公开(公告)号: US08537448B2公开(公告)日: 2013-09-17
- 发明人: Masato Yamada
- 申请人: Masato Yamada
- 申请人地址: JP Moriguchi-Shi, Osaka
- 专利权人: Sanyo Electric Co., Ltd.
- 当前专利权人: Sanyo Electric Co., Ltd.
- 当前专利权人地址: JP Moriguchi-Shi, Osaka
- 代理机构: Ditthavong Mori & Steiner, P.C.
- 优先权: JP2010-288848 20101224; JP2011-119781 20110527
- 主分类号: G02B26/08
- IPC分类号: G02B26/08
摘要:
A mirror actuator has a first pivot portion which is pivotally supported on a base member, and a second pivot portion which is pivotally supported on the first pivot portion. A mirror is disposed in the second pivot portion. A first coil is disposed in the first pivot portion, and a second coil is disposed in the second pivot portion. A first elastic member connects between the base member and the first pivot portion. A second elastic member connects between the first pivot portion and the second pivot portion. The first elastic member and the second elastic member are connected by a circuit pattern. With the provision of the first elastic member, the second elastic member and the circuit pattern, a current is supplied to the first coil and to the second coil.
公开/授权文献
- US20120162740A1 MIRROR ACTUATOR AND BEAM IRRADIATION DEVICE 公开/授权日:2012-06-28
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