发明授权
- 专利标题： Load port
- 专利标题（中）： 加载端口
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申请号： US13204865申请日： 2011-08-08
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公开(公告)号： US08540473B2公开(公告)日： 2013-09-24
- 发明人: Fuminori Asa , Yasushi Taniyama
- 申请人： Fuminori Asa , Yasushi Taniyama
- 申请人地址： JP Tokyo
- 专利权人： Sinfonia Technology Co., Ltd.
- 当前专利权人： Sinfonia Technology Co., Ltd.
- 当前专利权人地址： JP Tokyo
- 代理机构： Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权： JP2010-178235 20100807
- 主分类号： B65B21/02
- IPC分类号： B65B21/02
摘要：
A load port including a frame having an opening, a vessel receiving table that receives the wafer vessel, a door removably attached to the opening, a door opening and closing mechanism that opens and closes the door, and a closing mechanism that exerts force on the door when the door opening and closing mechanism closes the door.
公开/授权文献
- US20120034051A1 LOAD PORT 公开/授权日：2012-02-09
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