公开(公告)号：US08423173B2

公开(公告)日：2013-04-16

申请号：US12833119

申请日：2010-07-09

申请人： Kensuke Suzuki ,  Fuminori Asa ,  Yuuki Taira

发明人： Kensuke Suzuki ,  Fuminori Asa ,  Yuuki Taira

IPC分类号： H01L21/677 ,  B65G65/34 ,  G06F19/00 ,  G06F7/00

CPC分类号： H01L21/67772

摘要： A load port apparatus is disclosed wherein the total period of time of operation of a lid member mounting and dismounting apparatus and a mapping apparatus is minimized while avoiding interference of the two apparatus with each other. An interference avoiding sensor apparatus is provided on the lid member mounting and dismounting apparatus and the mapping apparatus and detects that a lid member suction plate of the lid member mounting and dismounting apparatus is disposed at a position lower by a value exceeding a preset value than the arm to which the mapping sensors are attached to enable pivotal motion of the arm without interfering with the lid member suction plate. Then, immediately after the preset value is detected by the interference avoiding sensor apparatus, the arm is pivoted to the mapping position to start the mapping.

摘要翻译： 公开了一种负载端口装置，其中，尽可能地避免盖构件安装和拆卸装置和映射装置的总操作时间，同时避免两个装置彼此干涉。 在盖构件安装和拆卸装置和映射装置上设置有防干扰传感器装置，并且检测到盖构件安装和拆卸装置的盖构件吸引板被设置在低于超过预定值的值的位置 附接地图传感器的臂能够实现臂的枢转运动，而不会妨碍盖构件吸板。 然后，在通过干扰避免传感器装置检测到预设值之后立即将臂枢转到映射位置以开始映射。

公开(公告)号：US20050028928A1

公开(公告)日：2005-02-10

申请号：US10900880

申请日：2004-07-28

申请人： Fuminori Asa

发明人： Fuminori Asa

IPC分类号： G02F1/13 ,  B08B3/02 ,  B08B3/10 ,  B08B7/00 ,  H01L21/00 ,  H01L21/304 ,  H01L21/683 ,  H05F1/00 ,  H05F3/06 ,  C23F1/00

CPC分类号： H01L21/6719 ,  H01L21/67236

摘要： A transmitting window is provided on one side of a casing opposite to a substrate outlet. An ionizer is provided outside the transmitting window of a cleaning unit. The transmitting window is made of a polyimide resin or an acrylic resin, for example. Weak X-rays emitted from the ionizer pass through the transmitting window to reach the substrate outlet, shutter, spin chuck, guard, and the like in the cleaning unit. The spin chuck comprises a plurality of conductive holding pins.

摘要翻译： 在与衬底出口相对的壳体的一侧上设置有透光窗。 离子发生器设置在清洁单元的发送窗口的外部。 透射窗例如由聚酰亚胺树脂或丙烯酸树脂制成。 从电离器发射的弱X射线通过透射窗，到达清洁单元中的基板出口，挡板，旋转卡盘，防护罩等。 旋转卡盘包括多个导电保持销。

公开(公告)号：US06712579B2

公开(公告)日：2004-03-30

申请号：US10121778

申请日：2002-04-11

申请人： Kenji Fujii ,  Fuminori Asa ,  Ryuichi Hayama ,  Tomoyuki Komura

发明人： Kenji Fujii ,  Fuminori Asa ,  Ryuichi Hayama ,  Tomoyuki Komura

IPC分类号： B66C2300

CPC分类号： H01L21/68707

摘要： A substrate transfer apparatus provided with a first substrate transfer mechanism having a first substrate holding hand which is movable while holding a substrate; and a second substrate transfer mechanism having a second substrate holding hand for receiving and transferring a substrate directly from and to the first substrate holding hand. The apparatus has a positioning mechanism disposed, in a moving passage of a substrate held by the first substrate holding hand, independently from the first substrate transfer mechanism, and having a positioning contact portion for regulating the movement of a substrate such that the substrate is positioned at a predetermined position on the first substrate holding hand.

摘要翻译： 一种基板传送装置，其具有第一基板传送机构，该第一基板传送机构具有可保持基板的同时可移动的第一基板固定手; 以及具有第二基板固定手的第二基板传送机构，用于直接从第一基板夹持手接收和传送基板。 该设备具有定位机构，该定位机构设置在与第一基板握持手保持的基板的移动通道中，独立于第一基板传送机构，并且具有用于调节基板的移动的定位接触部分，使得基板定位 在第一基板握持手的预定位置处。

公开(公告)号：US20120034051A1

公开(公告)日：2012-02-09

申请号：US13204865

申请日：2011-08-08

申请人： Fuminori ASA ,  Yasushi Taniyama

发明人： Fuminori ASA ,  Yasushi Taniyama

IPC分类号： H01L21/67

CPC分类号： H01L21/67772

摘要： A load port including a frame having an opening, a vessel receiving table that receives the wafer vessel, a door removably attached to the opening, a door opening and closing mechanism that opens and closes the door, and a closing mechanism that exerts force on the door when the door opening and closing mechanism closes the door.

摘要翻译： 包括具有开口的框架的装载端口，容纳晶片容器的容器接收台，可拆卸地附接到开口的门，用于打开和关闭门的门打开和关闭机构，以及关闭机构， 当门打开和关闭机构关闭门时门。

公开(公告)号：US20110005868A1

公开(公告)日：2011-01-13

申请号：US12833119

申请日：2010-07-09

申请人： Kensuke Suzuki ,  Fuminori Asa ,  Yuuki Taira

发明人： Kensuke Suzuki ,  Fuminori Asa ,  Yuuki Taira

IPC分类号： B66B1/24 ,  E05F15/00

CPC分类号： H01L21/67772

摘要： A load port apparatus is disclosed wherein the total period of time of operation of a lid member mounting and dismounting apparatus and a mapping apparatus is minimized while avoiding interference of the two apparatus with each other. An interference avoiding sensor apparatus is provided on the lid member mounting and dismounting apparatus and the mapping apparatus and detects that a lid member suction plate of the lid member mounting and dismounting apparatus is disposed at a position lower by a value exceeding a preset value than the arm to which the mapping sensors are attached to enable pivotal motion of the arm without interfering with the lid member suction plate. Then, immediately after the preset value is detected by the interference avoiding sensor apparatus, the arm is pivoted to the mapping position to start the mapping.

摘要翻译： 公开了一种负载端口装置，其中，尽可能地避免盖构件安装和拆卸装置和映射装置的总操作时间，同时避免两个装置彼此干涉。 在盖构件安装和拆卸装置和映射装置上设置有防干扰传感器装置，并且检测到盖构件安装和拆卸装置的盖构件吸引板被设置在低于超过预定值的值的位置 附接地图传感器的臂能够实现臂的枢转运动，而不会妨碍盖构件吸板。 然后，在通过干扰避免传感器装置检测到预设值之后立即将臂枢转到映射位置以开始映射。

公开(公告)号：US07596425B2

公开(公告)日：2009-09-29

申请号：US10860267

申请日：2004-06-02

申请人： Fuminori Asa

发明人： Fuminori Asa

IPC分类号： G07F7/00

CPC分类号： H01L21/67259 ,  H01L21/681

摘要： A substrate is supported by planes of four substrate supporters arranged on the top surface of a transport arm. Three ultrasonic distance measuring sensors are fixed on a fixing base arranged above the substrate. The three ultrasonic distance measuring sensors are arranged to measure the distances to the top surface of the substrate in the vicinity of its periphery. In this case, the ultrasonic distance measuring sensors are positioned so that measurement values of the ultrasonic distance measuring sensors may become equal to each other with the substrate being normally supported. The ultrasonic distance measuring sensors each measure the distances to the top surface of the substrate to supply the measurement values to a controller.

摘要翻译： 衬底由布置在传送臂的顶表面上的四个衬底支撑体的平面支撑。 三个超声波测距传感器固定在布置在基板上方的固定底座上。 三个超声波距离测量传感器布置成测量在其周边附近到基板顶表面的距离。 在这种情况下，超声波距离测量传感器被定位成使得超声波距离测量传感器的测量值可以在正常地被支撑的基板上彼此相等。 超声波距离测量传感器各自测量到基板顶表面的距离，以将测量值提供给控制器。

公开(公告)号：US08540473B2

公开(公告)日：2013-09-24

申请号：US13204865

申请日：2011-08-08

申请人： Fuminori Asa ,  Yasushi Taniyama

发明人： Fuminori Asa ,  Yasushi Taniyama

IPC分类号： B65B21/02

CPC分类号： H01L21/67772

摘要： A load port including a frame having an opening, a vessel receiving table that receives the wafer vessel, a door removably attached to the opening, a door opening and closing mechanism that opens and closes the door, and a closing mechanism that exerts force on the door when the door opening and closing mechanism closes the door.

摘要翻译： 包括具有开口的框架的装载端口，容纳晶片容器的容器接收台，可拆卸地附接到开口的门，用于打开和关闭门的门打开和关闭机构，以及关闭机构， 当门打开和关闭机构关闭门时门。