Invention Grant
- Patent Title: Plating method and apparatus with multiple internally irrigated chambers
- Patent Title (中): 具有多个内部灌溉室的电镀方法和装置
-
Application No.: US13571199Application Date: 2012-08-09
-
Publication No.: US08540857B1Publication Date: 2013-09-24
- Inventor: Steven Mayer , Shantinath Ghongadi , Kousik Ganesan , Zhian He , Jingbin Feng
- Applicant: Steven Mayer , Shantinath Ghongadi , Kousik Ganesan , Zhian He , Jingbin Feng
- Applicant Address: US CA Fremont
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25B9/00
- IPC: C25B9/00 ; C25D17/00 ; C25D7/12
Abstract:
An apparatus for electroplating a layer of metal onto a work piece surface includes a membrane separating the chamber of the apparatus into a catholyte chamber and an anolyte chamber. In the catholyte chamber is a catholyte manifold region that includes a catholyte manifold and at least one flow distribution tube. The catholyte manifold and at least one flow distribution tube serve to mix and direct catholyte flow in the catholyte chamber. The provided configuration effectively reduces failure and improves the operational ranges of the apparatus.
Information query
