发明授权
- 专利标题： Plating method and apparatus with multiple internally irrigated chambers
- 专利标题（中）： 具有多个内部灌溉室的电镀方法和装置
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申请号： US13571199申请日： 2012-08-09
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公开(公告)号： US08540857B1公开(公告)日： 2013-09-24
- 发明人: Steven Mayer , Shantinath Ghongadi , Kousik Ganesan , Zhian He , Jingbin Feng
- 申请人： Steven Mayer , Shantinath Ghongadi , Kousik Ganesan , Zhian He , Jingbin Feng
- 申请人地址： US CA Fremont
- 专利权人： Novellus Systems, Inc.
- 当前专利权人： Novellus Systems, Inc.
- 当前专利权人地址： US CA Fremont
- 代理机构： Weaver Austin Villeneuve & Sampson LLP
- 主分类号： C25B9/00
- IPC分类号： C25B9/00 ; C25D17/00 ; C25D7/12
摘要：
An apparatus for electroplating a layer of metal onto a work piece surface includes a membrane separating the chamber of the apparatus into a catholyte chamber and an anolyte chamber. In the catholyte chamber is a catholyte manifold region that includes a catholyte manifold and at least one flow distribution tube. The catholyte manifold and at least one flow distribution tube serve to mix and direct catholyte flow in the catholyte chamber. The provided configuration effectively reduces failure and improves the operational ranges of the apparatus.