Invention Grant
- Patent Title: Methods of fabricating a memory device
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Application No.: US13781862Application Date: 2013-03-01
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Publication No.: US08546215B2Publication Date: 2013-10-01
- Inventor: Gordon Haller , Sanh Dang Tang , Steve Cummings
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John, P.S.
- Main IPC: H01L29/94
- IPC: H01L29/94

Abstract:
A memory device comprising a vertical transistor includes a digit line that is directly coupled to the source regions of each memory cell. Because an electrical plug is not used to form a contact between the digit line and the source regions, a number of fabrication steps may be reduced and the possibility for manufacturing defects may also be reduced. In some embodiments, a memory device may include a vertical transistor having gate regions that are recessed from an upper portion of a silicon substrate. With the gate regions recessed from the silicon substrate, the gate regions are spaced further from the source/drain regions and, accordingly, cross capacitance between the gate regions and the source/drain regions may be reduced.
Public/Granted literature
- US20130178025A1 Methods Of Fabricating A Memory Device Public/Granted day:2013-07-11
Information query
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