Invention Grant
US08546860B2 Stress engineering to reduce dark current of CMOS image sensors
有权
应力工程可以减少CMOS图像传感器的暗电流
- Patent Title: Stress engineering to reduce dark current of CMOS image sensors
- Patent Title (中): 应力工程可以减少CMOS图像传感器的暗电流
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Application No.: US13494769Application Date: 2012-06-12
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Publication No.: US08546860B2Publication Date: 2013-10-01
- Inventor: Ru-Shang Hsiao , Nai-Wen Cheng , Chung-Te Lin , Chien-Hsien Tseng , Shou-Gwo Wuu
- Applicant: Ru-Shang Hsiao , Nai-Wen Cheng , Chung-Te Lin , Chien-Hsien Tseng , Shou-Gwo Wuu
- Applicant Address: TW
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW
- Agency: Lowe Hauptman & Ham, LLP
- Main IPC: H01L31/113
- IPC: H01L31/113 ; H01L31/173

Abstract:
This disclosure relates to an active pixel cell including a shallow trench isolation (STI) structure. The active pixel cell further includes a photodiode neighboring the STI structure, where a first stress resulted from substrate processing prior to deposition of a pre-metal dielectric layer increases dark current and white cell counts of a photodiode of the active pixel cell. The active pixel cell further includes a transistor, where the transistor controls the operation of the active pixel cell. The active pixel cell further includes a stress layer over the photodiode, the STI structure, and the transistor, and the stress layer has a second stress that counters the first stress exerted on the substrate, and the second stress reduces the dark current and the white cell counts caused by the first stress.
Public/Granted literature
- US20120248515A1 STRESS ENGINEERING TO REDUCE DARK CURRENT OF CMOS IMAGE SENSORS Public/Granted day:2012-10-04
Information query
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