发明授权
- 专利标题: Light receiving element, light receiving device, and light receiving module
- 专利标题(中): 光接收元件,光接收装置和光接收模块
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申请号: US13401016申请日: 2012-02-21
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公开(公告)号: US08546899B2公开(公告)日: 2013-10-01
- 发明人: Kazumasa Takabayashi
- 申请人: Kazumasa Takabayashi
- 申请人地址: JP Kawasaki
- 专利权人: Fujitsu Limited
- 当前专利权人: Fujitsu Limited
- 当前专利权人地址: JP Kawasaki
- 代理机构: Kratz, Quintos & Hanson, LLP
- 优先权: JP2011-061843 20110320
- 主分类号: H01L31/0232
- IPC分类号: H01L31/0232
摘要:
A light receiving element includes a waveguide that includes a waveguide core, a multi-mode interference waveguide that has a width larger than a width of the waveguide, the multi-mode interference waveguide receiving a first light from the waveguide core at a first end, and a photodetection portion that includes a first semiconductor layer and an absorption layer disposed on the first semiconductor layer, the first semiconductor layer including at least one layer and receiving a second light from the multi-mode interference waveguide at a second end, the absorption layer being disposed above the first semiconductor layer and absorbing the second light. A distance from the first end of the multi-mode interference waveguide to the second end of the photodetection portion is longer than 70% of a first length and shorter than 100% of the first length, the first length being a length where self-imaging occurs in the multi-mode interference waveguide.
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