发明授权
- 专利标题: Non-volatile semiconductor memory device and manufacturing method thereof
- 专利标题(中): 非易失性半导体存储器件及其制造方法
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申请号: US13498541申请日: 2011-07-07
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公开(公告)号: US08551853B2公开(公告)日: 2013-10-08
- 发明人: Kiyotaka Tsuji , Takumi Mikawa , Kenji Tominaga
- 申请人: Kiyotaka Tsuji , Takumi Mikawa , Kenji Tominaga
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: McDermott Will & Emery LLP
- 优先权: JP2010-155635 20100708
- 国际申请: PCT/JP2011/003902 WO 20110707
- 国际公布: WO2012/005003 WO 20121201
- 主分类号: H01L21/20
- IPC分类号: H01L21/20
摘要:
A non-volatile semiconductor memory device comprises a plurality of memory cell holes (101) formed through an interlayer insulating layer (80) at respective cross-points of a plurality of first wires (10) of a stripe shape and a plurality of second wires (20) of a stripe shape when viewed from above such that the memory cell holes (101) expose upper surfaces of the plurality of first wires, respectively, a plurality of dummy holes (111) formed on the plurality of first wires in the interlayer insulating layer such that the dummy holes reach the upper surfaces of the plurality of first wires, respectively, and stacked-layer structures formed inside the memory cell holes and inside the dummy holes, respectively, each of the stacked-layer structures including a first electrode (30) and a variable resistance layer (40); an area of a portion of the first wire which is exposed in a lower opening of one of the dummy holes being greater than an area of a portion of the first wire which is exposed in a lower opening of one of the memory cell holes; and one or more of the dummy holes being formed on each of the first wires.
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