发明授权
- 专利标题： MEMS sensor with folded torsion springs
- 专利标题（中）： 具有折叠扭力弹簧的MEMS传感器
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申请号： US13012643申请日： 2011-01-24
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公开(公告)号： US08555719B2公开(公告)日： 2013-10-15
- 发明人: Andrew C. McNeil , Gary G. Li
- 申请人： Andrew C. McNeil , Gary G. Li
- 申请人地址： US TX Austin
- 专利权人： Freescale Semiconductor, Inc.
- 当前专利权人： Freescale Semiconductor, Inc.
- 当前专利权人地址： US TX Austin
- 代理机构： Schmeiser, Olsen & Watts LLP
- 代理商 Lowell W. Graham; Charlene R. Jacobsen
- 主分类号： G01P15/125
- IPC分类号： G01P15/125
摘要：
A microelectromechanical systems (MEMS) sensor (40) includes a substrate (46) and a suspension anchor (54) formed on a planar surface (48) of the substrate (46). A first folded torsion spring (58) and a second folded torsion spring (60) interconnect the movable element (56) with the suspension anchor (54) to suspend the movable element (56) above the substrate (46). The folded torsion springs (58, 60) are each formed from multiple segments (76) that are linked together by bar elements (78) in a serpentine fashion. The folded torsion springs (58, 60) have an equivalent shape and are oriented relative to one another in rotational symmetry about a centroid (84) of the suspension anchor (54).
公开/授权文献
- US20120186346A1 MEMS SENSOR WITH FOLDED TORSION SPRINGS 公开/授权日：2012-07-26
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