Invention Grant
US08557210B2 Recycling of high-boiling compounds within an integrated chlorosilane system 有权
在一体化氯硅烷系统内回收高沸点化合物

Recycling of high-boiling compounds within an integrated chlorosilane system
Abstract:
Trichlorosilane production is increased while simultaneously lowering environmental burden due to destruction and disposition of high boilers by feeding high boilers from trichlorosilane production or from polycrystalline silicon production into a fluidized bed for production of trichlorosilane from metallic silicon and hydrogen chloride.
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