发明授权
- 专利标题: Low leakage capacitor for analog floating-gate integrated circuits
- 专利标题(中): 用于模拟浮栅集成电路的低漏电容
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申请号: US13070222申请日: 2011-03-23
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公开(公告)号: US08558296B2公开(公告)日: 2013-10-15
- 发明人: Imran Mahmood Khan , Allan T. Mitchell , Kaiping Liu
- 申请人: Imran Mahmood Khan , Allan T. Mitchell , Kaiping Liu
- 申请人地址: US TX Dallas
- 专利权人: Texas Instruments Incorporated
- 当前专利权人: Texas Instruments Incorporated
- 当前专利权人地址: US TX Dallas
- 代理商 Rose Alyssa Keagy; W. James Brady; Frederick J. Telecky, Jr.
- 主分类号: H01L27/108
- IPC分类号: H01L27/108
摘要:
An analog floating-gate electrode in an integrated circuit, and method of fabricating the same, in which trapped charge can be stored for long durations. The analog floating-gate electrode is formed in a polycrystalline silicon gate level, and includes portions serving as a transistor gate electrode, a plate of a metal-to-poly storage capacitor, and a plate of poly-to-active tunneling capacitors. Silicide-block silicon dioxide blocks the formation of silicide cladding on the electrode, while other polysilicon structures in the integrated circuit are silicide-clad.
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