发明授权
US08558296B2 Low leakage capacitor for analog floating-gate integrated circuits 有权
用于模拟浮栅集成电路的低漏电容

Low leakage capacitor for analog floating-gate integrated circuits
摘要:
An analog floating-gate electrode in an integrated circuit, and method of fabricating the same, in which trapped charge can be stored for long durations. The analog floating-gate electrode is formed in a polycrystalline silicon gate level, and includes portions serving as a transistor gate electrode, a plate of a metal-to-poly storage capacitor, and a plate of poly-to-active tunneling capacitors. Silicide-block silicon dioxide blocks the formation of silicide cladding on the electrode, while other polysilicon structures in the integrated circuit are silicide-clad.
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