Invention Grant
US08558307B2 Semiconductor device with diffused MOS transistor and manufacturing method of the same
有权
具有扩散MOS晶体管的半导体器件及其制造方法
- Patent Title: Semiconductor device with diffused MOS transistor and manufacturing method of the same
- Patent Title (中): 具有扩散MOS晶体管的半导体器件及其制造方法
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Application No.: US11958531Application Date: 2007-12-18
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Publication No.: US08558307B2Publication Date: 2013-10-15
- Inventor: Shuichi Kikuchi , Kiyofumi Nakaya , Shuji Tanaka
- Applicant: Shuichi Kikuchi , Kiyofumi Nakaya , Shuji Tanaka
- Applicant Address: JP Ora-gun US AZ Phoenix
- Assignee: SANYO Semiconductor Co., Ltd.,Semiconductor Components Industries, LLC
- Current Assignee: SANYO Semiconductor Co., Ltd.,Semiconductor Components Industries, LLC
- Current Assignee Address: JP Ora-gun US AZ Phoenix
- Agency: Morrison & Foerster LLP
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
It is desirable to reduce chip area, lower on resistance and improve electric current driving capacity of a DMOS transistor in a semiconductor device with a DMOS transistor. On the surface of an N type epitaxial layer, a P+W layer of the opposite conductivity type (P type) is disposed and a DMOS transistor is formed in the P+W layer. The epitaxial layer and a drain region are insulated by the P+W layer. Therefore, it is possible to form both the DMOS transistor and other device element in a single confined region surrounded by an isolation layer. An N type FN layer is disposed on the surface region of the P+W layer beneath the gate electrode. An N+D layer, which is adjacent to the edge of the gate electrode of the drain layer side, is also formed. P type impurity layers (a P+D layer and a FP layer), which are located below the drain layer, are disposed beneath the contact region of the drain layer.
Public/Granted literature
- US20090152628A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2009-06-18
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