Invention Grant
- Patent Title: Coating device
- Patent Title (中): 涂装装置
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Application No.: US12967000Application Date: 2010-12-13
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Publication No.: US08562744B2Publication Date: 2013-10-22
- Inventor: Chia-Ying Wu
- Applicant: Chia-Ying Wu
- Applicant Address: TW New Taipei
- Assignee: Hon Hai Precision Industry Co., Ltd.
- Current Assignee: Hon Hai Precision Industry Co., Ltd.
- Current Assignee Address: TW New Taipei
- Agency: Altis & Wispro Law Group, Inc.
- Priority: TW99110660A 20100407
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23F1/00 ; H01L21/306

Abstract:
A coating device includes two workspaces, two first slide rails, two second slide rails, two transporting loops, a number of rotating platforms, and a number of loading poles. The first slide rails are respectively fixed on the bottoms of the workspaces. The second slide rails are respectively fixed on the tops of the workspaces. The transporting loops are movably positioned on the first slide rails respectively. The rotating platforms are rotatably positioned on the transporting loops and capable of being driven by the transporting loops to rotate and slide along the first slide rails. The loading poles are positioned between the rotating platforms and the second slide rails, and are used for holding substrates. The loading poles are capable of being transported from one workspace to another workspace.
Public/Granted literature
- US20110247553A1 COATING DEVICE Public/Granted day:2011-10-13
Information query
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