Invention Grant
- Patent Title: Coaxial solder bump support structure
- Patent Title (中): 同轴焊点支撑结构
-
Application No.: US13194616Application Date: 2011-07-29
-
Publication No.: US08563416B2Publication Date: 2013-10-22
- Inventor: Brian Michael Erwin , Ian D. Melville , Ekta Misra , George John Scott
- Applicant: Brian Michael Erwin , Ian D. Melville , Ekta Misra , George John Scott
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Alexander Viderman; Catherine Ivers; L. Jeffrey Kelly
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L21/4763

Abstract:
A solder bump support structure and method of manufacturing thereof is provided. The solder bump support structure includes an inter-level dielectric (ILD) layer formed over a silicon substrate. The ILD layer has a plurality of conductive vias. The structure further includes a first insulation layer formed on the ILD layer. The solder bump support structure further includes a pedestal member formed on the ILD layer which includes a conductive material formed above the plurality of conductive vias in the ILD layer coaxially surrounded by a second insulation layer. The second insulation layer is thicker than the first insulation layer. The structure further includes a capping under bump metal (UBM) layer formed over, and in electrical contact with, the conductive material and formed over at least a portion of the second insulation layer of the pedestal member.
Public/Granted literature
- US20130026624A1 COAXIAL SOLDER BUMP SUPPORT STRUCTURE Public/Granted day:2013-01-31
Information query
IPC分类: