发明授权
- 专利标题： Shielding member having a charge control electrode, and a charged particle beam apparatus
- 专利标题（中）： 具有充电控制电极的屏蔽部件和带电粒子束装置
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申请号： US13196778申请日： 2011-08-02
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公开(公告)号： US08563927B2公开(公告)日： 2013-10-22
- 发明人: Dieter Winkler , Stefan Lanio
- 申请人： Dieter Winkler , Stefan Lanio
- 申请人地址： DE Heimstetten
- 专利权人： ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- 当前专利权人： ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- 当前专利权人地址： DE Heimstetten
- 代理机构： Patterson & Sheridan, LLP
- 优先权： EP11175427 20110726
- 主分类号： G21K7/00
- IPC分类号： G21K7/00 ; G01N23/04
摘要：
A shielding member for a charged particle beam apparatus includes a conductive substrate; and a through hole extending through the conductive substrate. The conductive substrate is comprised of a material having a specific electrical resistivity in a range from about 106 Ωcm to about 1012 Ωcm.
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