Invention Grant
- Patent Title: Integrated MEMS device and method of use
- Patent Title (中): 集成MEMS器件及其使用方法
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Application No.: US12979960Application Date: 2010-12-28
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Publication No.: US08567246B2Publication Date: 2013-10-29
- Inventor: Derek Shaeffer , Baris Cagdaser , Chiung C. Lo , Joseph Seeger
- Applicant: Derek Shaeffer , Baris Cagdaser , Chiung C. Lo , Joseph Seeger
- Applicant Address: US CA San Jose
- Assignee: Invensense, Inc.
- Current Assignee: Invensense, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Sawyer Law Group, P.C.
- Main IPC: G01C19/56
- IPC: G01C19/56
Abstract:
An integrated MEMS device is disclosed. The system comprises a MEMS resonator; and a MEMS device coupled to a MEMS resonator. The MEMS resonator and MEMS device are fabricated on a common substrate so that certain characteristics of the MEM resonator and MEMS device track each other as operating conditions vary.
Public/Granted literature
- US20120086446A1 INTEGRATED MEMS DEVICE AND METHOD OF USE Public/Granted day:2012-04-12
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