Integrated MEMS device and method of use
    1.
    发明授权
    Integrated MEMS device and method of use 有权
    集成MEMS器件及其使用方法

    公开(公告)号:US08567246B2

    公开(公告)日:2013-10-29

    申请号:US12979960

    申请日:2010-12-28

    IPC分类号: G01C19/56

    CPC分类号: G01R33/0286 H03H3/0073

    摘要: An integrated MEMS device is disclosed. The system comprises a MEMS resonator; and a MEMS device coupled to a MEMS resonator. The MEMS resonator and MEMS device are fabricated on a common substrate so that certain characteristics of the MEM resonator and MEMS device track each other as operating conditions vary.

    摘要翻译: 公开了集成的MEMS器件。 该系统包括MEMS谐振器; 以及耦合到MEMS谐振器的MEMS器件。 MEMS谐振器和MEMS器件制造在公共衬底上,使得MEM谐振器和MEMS器件的某些特性在操作条件变化时彼此跟踪。

    Micromachined resonant magnetic field sensors
    2.
    发明授权
    Micromachined resonant magnetic field sensors 有权
    微机械谐振磁场传感器

    公开(公告)号:US08947081B2

    公开(公告)日:2015-02-03

    申请号:US13004383

    申请日:2011-01-11

    CPC分类号: G01R33/038 G01R33/0286

    摘要: A micromachined magnetic field sensor is disclosed. The micromachined magnetic field sensor includes a substrate; and a drive subsystem partially supported by the substrate with a plurality of beams, and at least one anchor; a mechanism for providing an electrical current through the drive subsystem along a first axis; and Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field vector along a third axis. The micromachined magnetic field sensor also includes a position transducer to detect the motion of the drive subsystem and an electrostatic offset cancellation mechanism coupled to the drive subsystem.

    摘要翻译: 公开了一种微加工磁场传感器。 微加工磁场传感器包括基板; 以及驱动子系统,其由具有多个梁的所述衬底部分地支撑,以及至少一个锚; 用于沿着第一轴线提供穿过所述驱动子系统的电流的机构; 以及响应于沿着第三轴的磁场矢量沿第二轴作用在驱动子系统上的洛伦兹力。 微加工磁场传感器还包括位置传感器,用于检测驱动子系统的运动和耦合到驱动子系统的静电偏移消除机构。

    Micromachined resonant magnetic field sensors
    3.
    发明授权
    Micromachined resonant magnetic field sensors 有权
    微机械谐振磁场传感器

    公开(公告)号:US08860409B2

    公开(公告)日:2014-10-14

    申请号:US13004365

    申请日:2011-01-11

    CPC分类号: G01R33/038 G01R33/0286

    摘要: A micromachined magnetic field sensor is disclosed. The micromachined magnetic field comprises a substrate; a drive subsystem, the drive subsystem comprises a plurality of beams, and at least one anchor connected to the substrate; a mechanism for providing an electrical current through the drive subsystem along a first axis; and Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field along a third axis. The micromachined magnetic field sensor also includes a sense subsystem, the sense subsystem includes a plurality of beams, and at least one anchor connected to the substrate; wherein a portion of the sense subsystem moves along a fourth axis; a coupling spring between the drive subsystem and the sense subsystem which causes motion of the sense subsystem in response to the magnetic field; and a position transducer to detect the motion of the sense subsystem.

    摘要翻译: 公开了一种微加工磁场传感器。 微加工磁场包括基片; 驱动子系统,所述驱动子系统包括多个梁,以及连接到所述基板的至少一个锚固件; 用于沿着第一轴线提供穿过所述驱动子系统的电流的机构; 以及响应于沿着第三轴的磁场沿第二轴作用在驱动子系统上的洛伦兹力。 微加工磁场传感器还包括感测子系统,感测子系统包括多个光束,以及至少一个连接到衬底的锚; 其中所述感测子系统的一部分沿着第四轴线移动; 驱动子系统和感测子系统之间的耦合弹簧,其引起感测子系统响应于磁场的运动; 以及用于检测感测子系统的运动的位置传感器。

    DRIVE SYSTEM FOR MICROMACHINED MAGNETIC FIELD SENSORS
    4.
    发明申请
    DRIVE SYSTEM FOR MICROMACHINED MAGNETIC FIELD SENSORS 审中-公开
    微型磁场传感器的驱动系统

    公开(公告)号:US20120235670A1

    公开(公告)日:2012-09-20

    申请号:US13421545

    申请日:2012-03-15

    IPC分类号: G01R35/00

    CPC分类号: G01R33/028

    摘要: Described herein are systems, devices, and methods that provide a stable magnetometer. The magnetometer includes a drive element that facilitates flow of a drive current through a node and a sense element operable to detect a magnetic field operating on the drive current. To reduce offset in the detection of the magnetic field, a voltage detector, electrically coupled to the drive element through the node, determines a variation between a node voltage and a target voltage. The voltage detector facilitates suppression of the variation and thereby minimizes the offset in the sense element.

    摘要翻译: 这里描述了提供稳定磁力计的系统,装置和方法。 磁力计包括驱动元件,其驱动驱动电流流过节点,感测元件可操作以检测在驱动电流上运行的磁场。 为了减少磁场检测中的偏移,通过节点电耦合到驱动元件的电压检测器确定节点电压和目标电压之间的变化。 电压检测器有助于抑制变化,从而使感测元件中的偏移最小化。

    High-voltage MEMS apparatus and method
    5.
    发明授权
    High-voltage MEMS apparatus and method 有权
    高压MEMS器件及方法

    公开(公告)号:US09006832B2

    公开(公告)日:2015-04-14

    申请号:US13071374

    申请日:2011-03-24

    摘要: A high-voltage MEMS system compatible with low-voltage semiconductor process technology is disclosed. The system comprises a MEMS device coupled to a high-voltage bias generator employing an extended-voltage isolation residing in a semiconductor technology substrate. The system avoids the use of high-voltage transistors so that special high-voltage processing steps are not required of the semiconductor technology, thereby reducing process cost and complexity. MEMS testing capability is addressed with a self-test circuit allowing modulation of the bias voltage and current so that a need for external high-voltage connections and associated electro-static discharge protection circuitry are also avoided.

    摘要翻译: 公开了一种兼容低压半导体工艺技术的高压MEMS系统。 该系统包括耦合到高电压偏置发生器的MEMS器件,其采用驻留在半导体技术衬底中的扩展电压隔离。 该系统避免使用高压晶体管,因此不需要半导体技术的特殊高压处理步骤,从而降低工艺成本和复杂性。 利用允许调制偏置电压和电流的自检电路解决MEMS测试能力,从而也避免了外部高压连接和相关静电放电保护电路的需要。

    GYROSCOPE WITH PHASE AND DUTY-CYCLE LOCKED LOOP
    6.
    发明申请
    GYROSCOPE WITH PHASE AND DUTY-CYCLE LOCKED LOOP 有权
    具有相位和占空比锁定环的陀螺仪

    公开(公告)号:US20130099836A1

    公开(公告)日:2013-04-25

    申请号:US13335815

    申请日:2011-12-22

    IPC分类号: H03L7/08 G01C19/04

    摘要: A system and method in accordance with the present invention provides a gyroscope incorporating an improved PLL technique. The improved PLL auto-corrects its own reference low-frequency noise, thereby eliminating this source of noise, improving the noise performance of the gyroscope and allowing a compact implementation. The net result is a gyroscope with improved bias stability that can meet noise requirements with a smaller footprint.

    摘要翻译: 根据本发明的系统和方法提供了结合改进的PLL技术的陀螺仪。 改进的PLL自动校正其自己的参考低频噪声,从而消除了噪声源,提高了陀螺仪的噪声性能,并实现了紧凑的实现。 最终的结果是具有改进的偏置稳定性的陀螺仪,可以以更小的占地面积满足噪声要求。

    Circuits and methods for data multiplexing
    7.
    发明授权
    Circuits and methods for data multiplexing 有权
    电路和数据复用方法

    公开(公告)号:US07764715B2

    公开(公告)日:2010-07-27

    申请号:US10623028

    申请日:2003-07-17

    IPC分类号: H04J3/12

    摘要: A method and apparatus for data multiplexing is capable of high-speed operation with acceptable timing margins and has reduced sensitivity to supply voltage, temperature, manufacturing and other variations. One implementation relates to a data multiplexer that has no significant speed limitation associated with the clock-to-data delay of data latches, flip-flops, etc. In one implementation, clock-to-data delay is compensated for by introducing a delay-compensator in the clock line that drives a selector stage of the multiplexer. In one such implementation, a timing relationship is established between clock and data waveforms by timing the data waveforms with a first in-phase clock and operating the delay-compensated selector clock line with a second clock, which is delayed with respect to the first clock. The second clock can have a quadrature-phase delay with respect to the in-phase clock.

    摘要翻译: 用于数据复用的方法和装置能够以可接受的定时裕度进行高速运行,并且降低了对电源电压,温度,制造和其他变化的敏感性。 一个实现涉及数据多路复用器,其数据锁存器,触发器等的时钟到数据延迟没有显着的速度限制。在一个实现中,时钟到数据延迟通过引入延迟 - 驱动多路复用器选择器级的时钟线路补偿器。 在一个这样的实现中,通过用第一同相时钟对数据波形进行定时来计算时钟和数据波形之间的时序关系,并且以相对于第一时钟延迟的第二时钟来操作延迟补偿的选择器时钟线 。 第二个时钟可以具有相对于同相时钟的正交相位延迟。

    Closed loop power control for a wireless transmitter
    8.
    发明授权
    Closed loop power control for a wireless transmitter 失效
    无线发射机的闭环功率控制

    公开(公告)号:US08774738B2

    公开(公告)日:2014-07-08

    申请号:US13452756

    申请日:2012-04-20

    IPC分类号: H04B17/00

    CPC分类号: H03G3/3042 H04B17/13

    摘要: Embodiments of the present disclosure provide systems and methods for estimating gain and phase error in a wireless transmitter. Embodiments of the present disclosure provide a gain and phase controller that uses a digital gain and phase estimator to jointly estimate both gain and phase. The forward and feedback signals of a wireless transmitter are digitized using analog to digital (ADC) converters. The digital signals are correlated with each other to dynamically extract gain and phase estimates of the loop. The gain and phase estimates are used to correct gain and phase errors in the wireless transmitter.

    摘要翻译: 本公开的实施例提供了用于估计无线发射机中的增益和相位误差的系统和方法。 本公开的实施例提供增益和相位控制器,其使用数字增益和相位估计器来共同估计增益和相位。 无线发射机的正向和反馈信号使用模数(ADC)转换器进行数字化。 数字信号彼此相关,以动态地提取循环的增益和相位估计。 增益和相位估计用于校正无线发射机中的增益和相位误差。

    Closed Loop Power Control for a Wireless Transmitter
    10.
    发明申请
    Closed Loop Power Control for a Wireless Transmitter 失效
    无线发射机的闭环功率控制

    公开(公告)号:US20120270511A1

    公开(公告)日:2012-10-25

    申请号:US13452756

    申请日:2012-04-20

    IPC分类号: H04B17/00 H03G3/00

    CPC分类号: H03G3/3042 H04B17/13

    摘要: Embodiments of the present disclosure provide systems and methods for estimating gain and phase error in a wireless transmitter. Embodiments of the present disclosure provide a gain and phase controller that uses a digital gain and phase estimator to jointly estimate both gain and phase. The forward and feedback signals of a wireless transmitter are digitized using analog to digital (ADC) converters. The digital signals are correlated with each other to dynamically extract gain and phase estimates of the loop. The gain and phase estimates are used to correct gain and phase errors in the wireless transmitter.

    摘要翻译: 本公开的实施例提供了用于估计无线发射机中的增益和相位误差的系统和方法。 本公开的实施例提供增益和相位控制器,其使用数字增益和相位估计器来共同估计增益和相位。 无线发射机的正向和反馈信号使用模数(ADC)转换器进行数字化。 数字信号彼此相关,以动态地提取循环的增益和相位估计。 增益和相位估计用于校正无线发射机中的增益和相位误差。